7/30/2011	12:19:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/30/2011	12:19:33 PM	Recipe started at 12:19 PM
7/30/2011	12:19:33 PM	Helium valve closed
7/30/2011	12:19:33 PM	H2 valve closed
7/30/2011	12:19:33 PM	BCl3 valve closed
7/30/2011	12:19:33 PM	PH3 valve closed
7/30/2011	12:19:33 PM	SiCl4 pre valve closed
7/30/2011	12:19:33 PM	SiCl4 post valve closed
7/30/2011	12:19:33 PM	Main Vac valve closed
7/30/2011	12:19:33 PM	Bypass valve closed
7/30/2011	12:19:33 PM	Bubbler valve closed
7/30/2011	12:19:33 PM	Helium MFC set to  0.000000
7/30/2011	12:19:33 PM	H2 MFC set to  0.000000
7/30/2011	12:19:33 PM	BCl3 MFC set to  0.000000
7/30/2011	12:19:33 PM	PHl3 MFC set to  0.000000
7/30/2011	12:19:33 PM	SiCl4 MFC set to  0.000000
7/30/2011	12:19:33 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	12:19:33 PM	Tube furnace set to 0
7/30/2011	12:19:36 PM	H2 valve closed
7/30/2011	12:19:36 PM	BCl3 valve closed
7/30/2011	12:19:36 PM	PH3 valve closed
7/30/2011	12:19:36 PM	SiCl4 pre valve closed
7/30/2011	12:19:36 PM	SiCl4 post valve closed
7/30/2011	12:19:36 PM	Main Vac valve closed
7/30/2011	12:19:36 PM	Bypass valve closed
7/30/2011	12:19:36 PM	Bubbler valve closed
7/30/2011	12:19:36 PM	Helium valve opened
7/30/2011	12:19:36 PM	Helium MFC set to  500.000000
7/30/2011	12:19:36 PM	H2 MFC set to  0.000000
7/30/2011	12:19:36 PM	BCl3 MFC set to  0.000000
7/30/2011	12:19:36 PM	PHl3 MFC set to  0.000000
7/30/2011	12:19:36 PM	SiCl4 MFC set to  0.000000
7/30/2011	12:19:36 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	12:19:36 PM	Tube furnace set to 0
7/30/2011	12:20:41 PM	Helium valve closed
7/30/2011	12:20:41 PM	H2 valve closed
7/30/2011	12:20:41 PM	BCl3 valve closed
7/30/2011	12:20:41 PM	PH3 valve closed
7/30/2011	12:20:41 PM	SiCl4 pre valve closed
7/30/2011	12:20:41 PM	SiCl4 post valve closed
7/30/2011	12:20:41 PM	Main Vac valve closed
7/30/2011	12:20:41 PM	Bypass valve closed
7/30/2011	12:20:41 PM	Bubbler valve closed
7/30/2011	12:20:41 PM	Helium MFC set to  0.000000
7/30/2011	12:20:41 PM	H2 MFC set to  0.000000
7/30/2011	12:20:41 PM	BCl3 MFC set to  0.000000
7/30/2011	12:20:41 PM	PHl3 MFC set to  0.000000
7/30/2011	12:20:41 PM	SiCl4 MFC set to  0.000000
7/30/2011	12:20:41 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	12:20:42 PM	Tube furnace set to 0
7/30/2011	12:20:43 PM	Run finished at 12:20 PM
7/30/2011	12:20:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/30/2011	12:27:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/30/2011	12:27:32 PM	Recipe started at 12:27 PM
7/30/2011	12:27:32 PM	Helium valve closed
7/30/2011	12:27:32 PM	H2 valve closed
7/30/2011	12:27:32 PM	BCl3 valve closed
7/30/2011	12:27:32 PM	PH3 valve closed
7/30/2011	12:27:32 PM	SiCl4 pre valve closed
7/30/2011	12:27:32 PM	SiCl4 post valve closed
7/30/2011	12:27:32 PM	Main Vac valve closed
7/30/2011	12:27:32 PM	Bubbler valve closed
7/30/2011	12:27:32 PM	Bypass valve opened
7/30/2011	12:27:32 PM	Helium MFC set to  0.000000
7/30/2011	12:27:32 PM	H2 MFC set to  0.000000
7/30/2011	12:27:32 PM	BCl3 MFC set to  0.000000
7/30/2011	12:27:32 PM	PHl3 MFC set to  0.000000
7/30/2011	12:27:32 PM	SiCl4 MFC set to  0.000000
7/30/2011	12:27:32 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	12:27:32 PM	Tube furnace set to 0
7/30/2011	12:28:47 PM	Helium valve closed
7/30/2011	12:28:47 PM	H2 valve closed
7/30/2011	12:28:47 PM	BCl3 valve closed
7/30/2011	12:28:47 PM	PH3 valve closed
7/30/2011	12:28:47 PM	SiCl4 pre valve closed
7/30/2011	12:28:47 PM	SiCl4 post valve closed
7/30/2011	12:28:47 PM	Main Vac valve closed
7/30/2011	12:28:47 PM	Bubbler valve closed
7/30/2011	12:28:47 PM	Bypass valve opened
7/30/2011	12:28:47 PM	Helium MFC set to  0.000000
7/30/2011	12:28:47 PM	H2 MFC set to  0.000000
7/30/2011	12:28:47 PM	BCl3 MFC set to  0.000000
7/30/2011	12:28:47 PM	PHl3 MFC set to  0.000000
7/30/2011	12:28:47 PM	SiCl4 MFC set to  0.000000
7/30/2011	12:28:47 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	12:28:47 PM	Tube furnace set to 0
7/30/2011	12:29:47 PM	Helium valve closed
7/30/2011	12:29:47 PM	H2 valve closed
7/30/2011	12:29:47 PM	BCl3 valve closed
7/30/2011	12:29:47 PM	PH3 valve closed
7/30/2011	12:29:47 PM	SiCl4 pre valve closed
7/30/2011	12:29:47 PM	SiCl4 post valve closed
7/30/2011	12:29:47 PM	Bypass valve closed
7/30/2011	12:29:47 PM	Bubbler valve closed
7/30/2011	12:29:47 PM	Main Vac valve opened
7/30/2011	12:29:47 PM	Helium MFC set to  0.000000
7/30/2011	12:29:47 PM	H2 MFC set to  0.000000
7/30/2011	12:29:47 PM	BCl3 MFC set to  0.000000
7/30/2011	12:29:47 PM	PHl3 MFC set to  0.000000
7/30/2011	12:29:47 PM	SiCl4 MFC set to  0.000000
7/30/2011	12:29:47 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	12:29:47 PM	Tube furnace set to 0
7/30/2011	12:29:48 PM	Run finished at 12:29 PM
7/30/2011	12:29:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/30/2011	12:34:36 PM	Tube furnace set to 200
7/30/2011	12:37:55 PM	Tube furnace set to 500
7/30/2011	12:40:14 PM	Tube furnace set to 1000
7/30/2011	12:52:24 PM	Tube furnace set to 1050
7/30/2011	12:52:56 PM	Tube furnace set to 0
7/30/2011	12:54:30 PM	Main Vac valve closed
7/30/2011	12:54:43 PM	Main Vac valve opened
7/30/2011	12:55:56 PM	Main Vac valve closed
7/30/2011	12:56:19 PM	Main Vac valve opened
7/30/2011	1:14:03 PM	Main Vac valve closed
7/30/2011	1:14:16 PM	Main Vac valve opened
7/30/2011	1:31:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/30/2011	1:31:19 PM	Recipe started at 1:31 PM
7/30/2011	1:31:19 PM	Helium valve closed
7/30/2011	1:31:19 PM	H2 valve closed
7/30/2011	1:31:19 PM	BCl3 valve closed
7/30/2011	1:31:19 PM	PH3 valve closed
7/30/2011	1:31:19 PM	SiCl4 pre valve closed
7/30/2011	1:31:19 PM	SiCl4 post valve closed
7/30/2011	1:31:19 PM	Main Vac valve closed
7/30/2011	1:31:19 PM	Bypass valve closed
7/30/2011	1:31:19 PM	Bubbler valve closed
7/30/2011	1:31:19 PM	Helium MFC set to  0.000000
7/30/2011	1:31:19 PM	H2 MFC set to  0.000000
7/30/2011	1:31:19 PM	BCl3 MFC set to  0.000000
7/30/2011	1:31:19 PM	PHl3 MFC set to  0.000000
7/30/2011	1:31:19 PM	SiCl4 MFC set to  0.000000
7/30/2011	1:31:19 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	1:31:20 PM	Tube furnace set to 0
7/30/2011	1:31:23 PM	H2 valve closed
7/30/2011	1:31:23 PM	BCl3 valve closed
7/30/2011	1:31:23 PM	PH3 valve closed
7/30/2011	1:31:23 PM	SiCl4 pre valve closed
7/30/2011	1:31:23 PM	SiCl4 post valve closed
7/30/2011	1:31:23 PM	Main Vac valve closed
7/30/2011	1:31:23 PM	Bypass valve closed
7/30/2011	1:31:23 PM	Bubbler valve closed
7/30/2011	1:31:23 PM	Helium valve opened
7/30/2011	1:31:23 PM	Helium MFC set to  500.000000
7/30/2011	1:31:23 PM	H2 MFC set to  0.000000
7/30/2011	1:31:23 PM	BCl3 MFC set to  0.000000
7/30/2011	1:31:23 PM	PHl3 MFC set to  0.000000
7/30/2011	1:31:23 PM	SiCl4 MFC set to  0.000000
7/30/2011	1:31:23 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	1:31:23 PM	Tube furnace set to 0
7/30/2011	1:32:23 PM	Helium valve closed
7/30/2011	1:32:23 PM	H2 valve closed
7/30/2011	1:32:23 PM	BCl3 valve closed
7/30/2011	1:32:23 PM	PH3 valve closed
7/30/2011	1:32:23 PM	SiCl4 pre valve closed
7/30/2011	1:32:23 PM	SiCl4 post valve closed
7/30/2011	1:32:23 PM	Main Vac valve closed
7/30/2011	1:32:23 PM	Bypass valve closed
7/30/2011	1:32:23 PM	Bubbler valve closed
7/30/2011	1:32:23 PM	Helium MFC set to  0.000000
7/30/2011	1:32:23 PM	H2 MFC set to  0.000000
7/30/2011	1:32:23 PM	BCl3 MFC set to  0.000000
7/30/2011	1:32:23 PM	PHl3 MFC set to  0.000000
7/30/2011	1:32:23 PM	SiCl4 MFC set to  0.000000
7/30/2011	1:32:23 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	1:32:23 PM	Tube furnace set to 0
7/30/2011	1:32:24 PM	Run finished at 1:32 PM
7/30/2011	1:32:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/30/2011	1:34:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/30/2011	1:34:49 PM	Recipe started at 1:34 PM
7/30/2011	1:34:49 PM	Helium valve closed
7/30/2011	1:34:49 PM	H2 valve closed
7/30/2011	1:34:49 PM	BCl3 valve closed
7/30/2011	1:34:49 PM	PH3 valve closed
7/30/2011	1:34:49 PM	SiCl4 pre valve closed
7/30/2011	1:34:49 PM	SiCl4 post valve closed
7/30/2011	1:34:49 PM	Main Vac valve closed
7/30/2011	1:34:49 PM	Bubbler valve closed
7/30/2011	1:34:49 PM	Bypass valve opened
7/30/2011	1:34:49 PM	Helium MFC set to  0.000000
7/30/2011	1:34:49 PM	H2 MFC set to  0.000000
7/30/2011	1:34:49 PM	BCl3 MFC set to  0.000000
7/30/2011	1:34:49 PM	PHl3 MFC set to  0.000000
7/30/2011	1:34:49 PM	SiCl4 MFC set to  0.000000
7/30/2011	1:34:49 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	1:34:49 PM	Tube furnace set to 0
7/30/2011	1:35:25 PM	Run aborted at 1:35 PM
7/30/2011	1:35:25 PM	Helium valve closed
7/30/2011	1:35:25 PM	H2 valve closed
7/30/2011	1:35:25 PM	BCl3 valve closed
7/30/2011	1:35:25 PM	PH3 valve closed
7/30/2011	1:35:25 PM	SiCl4 pre valve closed
7/30/2011	1:35:25 PM	SiCl4 post valve closed
7/30/2011	1:35:25 PM	Bypass valve closed
7/30/2011	1:35:25 PM	Main Vac valve closed
7/30/2011	1:35:25 PM	Bubbler valve closed
7/30/2011	1:35:25 PM	Helium MFC set to  0.000000
7/30/2011	1:35:25 PM	H2 MFC set to  0.000000
7/30/2011	1:35:25 PM	BCl3 MFC set to  0.000000
7/30/2011	1:35:25 PM	PHl3 MFC set to  0.000000
7/30/2011	1:35:25 PM	SiCl4 MFC set to  0.000000
7/30/2011	1:35:25 PM	Tube furnace set to 0
7/30/2011	1:35:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/30/2011	1:35:29 PM	Bypass valve opened
7/30/2011	1:38:09 PM	Recipe started at 1:38 PM
7/30/2011	1:38:09 PM	Helium valve closed
7/30/2011	1:38:09 PM	H2 valve closed
7/30/2011	1:38:09 PM	BCl3 valve closed
7/30/2011	1:38:09 PM	PH3 valve closed
7/30/2011	1:38:09 PM	SiCl4 pre valve closed
7/30/2011	1:38:09 PM	SiCl4 post valve closed
7/30/2011	1:38:09 PM	Main Vac valve closed
7/30/2011	1:38:09 PM	Bubbler valve closed
7/30/2011	1:38:09 PM	Bypass valve opened
7/30/2011	1:38:09 PM	Helium MFC set to  0.000000
7/30/2011	1:38:09 PM	H2 MFC set to  0.000000
7/30/2011	1:38:09 PM	BCl3 MFC set to  0.000000
7/30/2011	1:38:09 PM	PHl3 MFC set to  0.000000
7/30/2011	1:38:09 PM	SiCl4 MFC set to  0.000000
7/30/2011	1:38:09 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	1:38:09 PM	Tube furnace set to 0
7/30/2011	1:38:09 PM	Helium valve closed
7/30/2011	1:38:09 PM	H2 valve closed
7/30/2011	1:38:09 PM	BCl3 valve closed
7/30/2011	1:38:09 PM	PH3 valve closed
7/30/2011	1:38:10 PM	SiCl4 pre valve closed
7/30/2011	1:38:10 PM	SiCl4 post valve closed
7/30/2011	1:38:10 PM	Main Vac valve closed
7/30/2011	1:38:10 PM	Bubbler valve closed
7/30/2011	1:38:10 PM	Bypass valve opened
7/30/2011	1:38:10 PM	Helium MFC set to  0.000000
7/30/2011	1:38:10 PM	H2 MFC set to  0.000000
7/30/2011	1:38:10 PM	BCl3 MFC set to  0.000000
7/30/2011	1:38:10 PM	PHl3 MFC set to  0.000000
7/30/2011	1:38:10 PM	SiCl4 MFC set to  0.000000
7/30/2011	1:38:10 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	1:38:10 PM	Tube furnace set to 0
7/30/2011	1:38:40 PM	Helium valve closed
7/30/2011	1:38:40 PM	H2 valve closed
7/30/2011	1:38:40 PM	BCl3 valve closed
7/30/2011	1:38:40 PM	PH3 valve closed
7/30/2011	1:38:40 PM	SiCl4 pre valve closed
7/30/2011	1:38:40 PM	SiCl4 post valve closed
7/30/2011	1:38:40 PM	Bypass valve closed
7/30/2011	1:38:40 PM	Bubbler valve closed
7/30/2011	1:38:40 PM	Main Vac valve opened
7/30/2011	1:38:40 PM	Helium MFC set to  0.000000
7/30/2011	1:38:40 PM	H2 MFC set to  0.000000
7/30/2011	1:38:40 PM	BCl3 MFC set to  0.000000
7/30/2011	1:38:40 PM	PHl3 MFC set to  0.000000
7/30/2011	1:38:40 PM	SiCl4 MFC set to  0.000000
7/30/2011	1:38:40 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	1:38:40 PM	Tube furnace set to 0
7/30/2011	1:49:47 PM	Run aborted at 1:49 PM
7/30/2011	1:49:47 PM	Helium valve closed
7/30/2011	1:49:47 PM	H2 valve closed
7/30/2011	1:49:47 PM	BCl3 valve closed
7/30/2011	1:49:47 PM	PH3 valve closed
7/30/2011	1:49:47 PM	SiCl4 pre valve closed
7/30/2011	1:49:47 PM	SiCl4 post valve closed
7/30/2011	1:49:47 PM	Bypass valve closed
7/30/2011	1:49:47 PM	Main Vac valve closed
7/30/2011	1:49:47 PM	Bubbler valve closed
7/30/2011	1:49:47 PM	Helium MFC set to  0.000000
7/30/2011	1:49:47 PM	H2 MFC set to  0.000000
7/30/2011	1:49:47 PM	BCl3 MFC set to  0.000000
7/30/2011	1:49:47 PM	PHl3 MFC set to  0.000000
7/30/2011	1:49:47 PM	SiCl4 MFC set to  0.000000
7/30/2011	1:49:48 PM	Tube furnace set to 0
7/30/2011	1:49:57 PM	Main Vac valve opened
7/30/2011	1:50:10 PM	Tube furnace set to 120
7/30/2011	1:51:04 PM	Main Vac valve closed
7/30/2011	1:51:04 PM	Main Vac valve opened
7/30/2011	1:51:05 PM	Main Vac valve closed
7/30/2011	1:51:16 PM	Main Vac valve opened
7/30/2011	1:52:40 PM	Recipe started at 1:52 PM
7/30/2011	1:52:40 PM	Helium valve closed
7/30/2011	1:52:40 PM	H2 valve closed
7/30/2011	1:52:40 PM	BCl3 valve closed
7/30/2011	1:52:40 PM	PH3 valve closed
7/30/2011	1:52:40 PM	SiCl4 pre valve closed
7/30/2011	1:52:40 PM	SiCl4 post valve closed
7/30/2011	1:52:40 PM	Bypass valve closed
7/30/2011	1:52:40 PM	Bubbler valve closed
7/30/2011	1:52:40 PM	Main Vac valve opened
7/30/2011	1:52:40 PM	Helium MFC set to  0.000000
7/30/2011	1:52:40 PM	H2 MFC set to  0.000000
7/30/2011	1:52:40 PM	BCl3 MFC set to  0.000000
7/30/2011	1:52:40 PM	PHl3 MFC set to  0.000000
7/30/2011	1:52:40 PM	SiCl4 MFC set to  0.000000
7/30/2011	1:52:40 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	1:52:40 PM	Tube furnace set to 0
7/30/2011	1:53:40 PM	H2 valve closed
7/30/2011	1:53:40 PM	BCl3 valve closed
7/30/2011	1:53:40 PM	PH3 valve closed
7/30/2011	1:53:40 PM	SiCl4 pre valve closed
7/30/2011	1:53:40 PM	SiCl4 post valve closed
7/30/2011	1:53:40 PM	Bypass valve closed
7/30/2011	1:53:40 PM	Bubbler valve closed
7/30/2011	1:53:40 PM	Helium valve opened
7/30/2011	1:53:40 PM	Main Vac valve opened
7/30/2011	1:53:40 PM	Helium MFC set to  20.000000
7/30/2011	1:53:40 PM	H2 MFC set to  0.000000
7/30/2011	1:53:40 PM	BCl3 MFC set to  0.000000
7/30/2011	1:53:40 PM	PHl3 MFC set to  0.000000
7/30/2011	1:53:40 PM	SiCl4 MFC set to  0.000000
7/30/2011	1:53:40 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	1:53:40 PM	Tube furnace set to 0
7/30/2011	1:54:10 PM	Helium valve closed
7/30/2011	1:54:10 PM	H2 valve closed
7/30/2011	1:54:10 PM	BCl3 valve closed
7/30/2011	1:54:10 PM	PH3 valve closed
7/30/2011	1:54:10 PM	SiCl4 pre valve closed
7/30/2011	1:54:10 PM	SiCl4 post valve closed
7/30/2011	1:54:10 PM	Bypass valve closed
7/30/2011	1:54:10 PM	Bubbler valve closed
7/30/2011	1:54:10 PM	Main Vac valve opened
7/30/2011	1:54:10 PM	Helium MFC set to  0.000000
7/30/2011	1:54:10 PM	H2 MFC set to  0.000000
7/30/2011	1:54:10 PM	BCl3 MFC set to  0.000000
7/30/2011	1:54:10 PM	PHl3 MFC set to  0.000000
7/30/2011	1:54:10 PM	SiCl4 MFC set to  0.000000
7/30/2011	1:54:10 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	1:54:10 PM	Tube furnace set to 0
7/30/2011	1:54:40 PM	H2 valve closed
7/30/2011	1:54:40 PM	BCl3 valve closed
7/30/2011	1:54:40 PM	PH3 valve closed
7/30/2011	1:54:40 PM	SiCl4 pre valve closed
7/30/2011	1:54:40 PM	SiCl4 post valve closed
7/30/2011	1:54:40 PM	Bypass valve closed
7/30/2011	1:54:40 PM	Bubbler valve closed
7/30/2011	1:54:40 PM	Helium valve opened
7/30/2011	1:54:40 PM	Main Vac valve opened
7/30/2011	1:54:40 PM	Helium MFC set to  20.000000
7/30/2011	1:54:40 PM	H2 MFC set to  0.000000
7/30/2011	1:54:40 PM	BCl3 MFC set to  0.000000
7/30/2011	1:54:40 PM	PHl3 MFC set to  0.000000
7/30/2011	1:54:40 PM	SiCl4 MFC set to  0.000000
7/30/2011	1:54:40 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	1:54:40 PM	Tube furnace set to 0
7/30/2011	1:55:10 PM	Helium valve closed
7/30/2011	1:55:10 PM	H2 valve closed
7/30/2011	1:55:10 PM	BCl3 valve closed
7/30/2011	1:55:10 PM	PH3 valve closed
7/30/2011	1:55:10 PM	SiCl4 pre valve closed
7/30/2011	1:55:10 PM	SiCl4 post valve closed
7/30/2011	1:55:10 PM	Bypass valve closed
7/30/2011	1:55:10 PM	Bubbler valve closed
7/30/2011	1:55:10 PM	Main Vac valve opened
7/30/2011	1:55:10 PM	Helium MFC set to  0.000000
7/30/2011	1:55:10 PM	H2 MFC set to  0.000000
7/30/2011	1:55:10 PM	BCl3 MFC set to  0.000000
7/30/2011	1:55:10 PM	PHl3 MFC set to  0.000000
7/30/2011	1:55:10 PM	SiCl4 MFC set to  0.000000
7/30/2011	1:55:10 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	1:55:11 PM	Tube furnace set to 0
7/30/2011	1:55:41 PM	H2 valve closed
7/30/2011	1:55:41 PM	BCl3 valve closed
7/30/2011	1:55:41 PM	PH3 valve closed
7/30/2011	1:55:41 PM	SiCl4 pre valve closed
7/30/2011	1:55:41 PM	SiCl4 post valve closed
7/30/2011	1:55:41 PM	Bypass valve closed
7/30/2011	1:55:41 PM	Bubbler valve closed
7/30/2011	1:55:41 PM	Helium valve opened
7/30/2011	1:55:41 PM	Main Vac valve opened
7/30/2011	1:55:41 PM	Helium MFC set to  20.000000
7/30/2011	1:55:41 PM	H2 MFC set to  0.000000
7/30/2011	1:55:41 PM	BCl3 MFC set to  0.000000
7/30/2011	1:55:41 PM	PHl3 MFC set to  0.000000
7/30/2011	1:55:41 PM	SiCl4 MFC set to  0.000000
7/30/2011	1:55:41 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	1:55:41 PM	Tube furnace set to 0
7/30/2011	1:56:11 PM	Helium valve closed
7/30/2011	1:56:11 PM	H2 valve closed
7/30/2011	1:56:11 PM	BCl3 valve closed
7/30/2011	1:56:11 PM	PH3 valve closed
7/30/2011	1:56:11 PM	SiCl4 pre valve closed
7/30/2011	1:56:11 PM	SiCl4 post valve closed
7/30/2011	1:56:11 PM	Bypass valve closed
7/30/2011	1:56:11 PM	Bubbler valve closed
7/30/2011	1:56:11 PM	Main Vac valve opened
7/30/2011	1:56:11 PM	Helium MFC set to  0.000000
7/30/2011	1:56:11 PM	H2 MFC set to  0.000000
7/30/2011	1:56:11 PM	BCl3 MFC set to  0.000000
7/30/2011	1:56:11 PM	PHl3 MFC set to  0.000000
7/30/2011	1:56:11 PM	SiCl4 MFC set to  0.000000
7/30/2011	1:56:11 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	1:56:11 PM	Tube furnace set to 0
7/30/2011	1:56:41 PM	H2 valve closed
7/30/2011	1:56:41 PM	BCl3 valve closed
7/30/2011	1:56:41 PM	PH3 valve closed
7/30/2011	1:56:41 PM	SiCl4 pre valve closed
7/30/2011	1:56:41 PM	SiCl4 post valve closed
7/30/2011	1:56:41 PM	Bypass valve closed
7/30/2011	1:56:41 PM	Bubbler valve closed
7/30/2011	1:56:41 PM	Helium valve opened
7/30/2011	1:56:41 PM	Main Vac valve opened
7/30/2011	1:56:41 PM	Helium MFC set to  20.000000
7/30/2011	1:56:41 PM	H2 MFC set to  0.000000
7/30/2011	1:56:41 PM	BCl3 MFC set to  0.000000
7/30/2011	1:56:41 PM	PHl3 MFC set to  0.000000
7/30/2011	1:56:41 PM	SiCl4 MFC set to  0.000000
7/30/2011	1:56:41 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	1:56:41 PM	Tube furnace set to 0
7/30/2011	1:57:11 PM	Helium valve closed
7/30/2011	1:57:11 PM	H2 valve closed
7/30/2011	1:57:11 PM	BCl3 valve closed
7/30/2011	1:57:11 PM	PH3 valve closed
7/30/2011	1:57:11 PM	SiCl4 pre valve closed
7/30/2011	1:57:11 PM	SiCl4 post valve closed
7/30/2011	1:57:11 PM	Bypass valve closed
7/30/2011	1:57:11 PM	Bubbler valve closed
7/30/2011	1:57:11 PM	Main Vac valve opened
7/30/2011	1:57:11 PM	Helium MFC set to  0.000000
7/30/2011	1:57:11 PM	H2 MFC set to  0.000000
7/30/2011	1:57:11 PM	BCl3 MFC set to  0.000000
7/30/2011	1:57:11 PM	PHl3 MFC set to  0.000000
7/30/2011	1:57:11 PM	SiCl4 MFC set to  0.000000
7/30/2011	1:57:11 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	1:57:11 PM	Tube furnace set to 0
7/30/2011	1:57:41 PM	H2 valve closed
7/30/2011	1:57:41 PM	BCl3 valve closed
7/30/2011	1:57:41 PM	PH3 valve closed
7/30/2011	1:57:41 PM	SiCl4 pre valve closed
7/30/2011	1:57:41 PM	SiCl4 post valve closed
7/30/2011	1:57:41 PM	Bypass valve closed
7/30/2011	1:57:41 PM	Bubbler valve closed
7/30/2011	1:57:41 PM	Helium valve opened
7/30/2011	1:57:41 PM	Main Vac valve opened
7/30/2011	1:57:41 PM	Helium MFC set to  20.000000
7/30/2011	1:57:41 PM	H2 MFC set to  0.000000
7/30/2011	1:57:41 PM	BCl3 MFC set to  0.000000
7/30/2011	1:57:41 PM	PHl3 MFC set to  0.000000
7/30/2011	1:57:41 PM	SiCl4 MFC set to  0.000000
7/30/2011	1:57:41 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	1:57:42 PM	Tube furnace set to 120
7/30/2011	1:58:12 PM	Helium valve closed
7/30/2011	1:58:12 PM	H2 valve closed
7/30/2011	1:58:12 PM	BCl3 valve closed
7/30/2011	1:58:12 PM	PH3 valve closed
7/30/2011	1:58:12 PM	SiCl4 pre valve closed
7/30/2011	1:58:12 PM	SiCl4 post valve closed
7/30/2011	1:58:12 PM	Bypass valve closed
7/30/2011	1:58:12 PM	Bubbler valve closed
7/30/2011	1:58:12 PM	Main Vac valve opened
7/30/2011	1:58:12 PM	Helium MFC set to  0.000000
7/30/2011	1:58:12 PM	H2 MFC set to  0.000000
7/30/2011	1:58:12 PM	BCl3 MFC set to  0.000000
7/30/2011	1:58:12 PM	PHl3 MFC set to  0.000000
7/30/2011	1:58:12 PM	SiCl4 MFC set to  0.000000
7/30/2011	1:58:12 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	1:58:12 PM	Tube furnace set to 120
7/30/2011	1:58:42 PM	H2 valve closed
7/30/2011	1:58:42 PM	BCl3 valve closed
7/30/2011	1:58:42 PM	PH3 valve closed
7/30/2011	1:58:42 PM	SiCl4 pre valve closed
7/30/2011	1:58:42 PM	SiCl4 post valve closed
7/30/2011	1:58:42 PM	Bypass valve closed
7/30/2011	1:58:42 PM	Bubbler valve closed
7/30/2011	1:58:42 PM	Helium valve opened
7/30/2011	1:58:42 PM	Main Vac valve opened
7/30/2011	1:58:42 PM	Helium MFC set to  20.000000
7/30/2011	1:58:42 PM	H2 MFC set to  0.000000
7/30/2011	1:58:42 PM	BCl3 MFC set to  0.000000
7/30/2011	1:58:42 PM	PHl3 MFC set to  0.000000
7/30/2011	1:58:42 PM	SiCl4 MFC set to  0.000000
7/30/2011	1:58:42 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	1:58:42 PM	Tube furnace set to 120
7/30/2011	1:59:12 PM	Helium valve closed
7/30/2011	1:59:12 PM	H2 valve closed
7/30/2011	1:59:12 PM	BCl3 valve closed
7/30/2011	1:59:12 PM	PH3 valve closed
7/30/2011	1:59:12 PM	SiCl4 pre valve closed
7/30/2011	1:59:12 PM	SiCl4 post valve closed
7/30/2011	1:59:12 PM	Bypass valve closed
7/30/2011	1:59:12 PM	Bubbler valve closed
7/30/2011	1:59:12 PM	Main Vac valve opened
7/30/2011	1:59:12 PM	Helium MFC set to  0.000000
7/30/2011	1:59:12 PM	H2 MFC set to  0.000000
7/30/2011	1:59:12 PM	BCl3 MFC set to  0.000000
7/30/2011	1:59:12 PM	PHl3 MFC set to  0.000000
7/30/2011	1:59:12 PM	SiCl4 MFC set to  0.000000
7/30/2011	1:59:12 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	1:59:12 PM	Tube furnace set to 120
7/30/2011	1:59:42 PM	H2 valve closed
7/30/2011	1:59:42 PM	BCl3 valve closed
7/30/2011	1:59:42 PM	PH3 valve closed
7/30/2011	1:59:42 PM	SiCl4 pre valve closed
7/30/2011	1:59:42 PM	SiCl4 post valve closed
7/30/2011	1:59:42 PM	Bypass valve closed
7/30/2011	1:59:42 PM	Bubbler valve closed
7/30/2011	1:59:42 PM	Helium valve opened
7/30/2011	1:59:42 PM	Main Vac valve opened
7/30/2011	1:59:42 PM	Helium MFC set to  20.000000
7/30/2011	1:59:42 PM	H2 MFC set to  0.000000
7/30/2011	1:59:42 PM	BCl3 MFC set to  0.000000
7/30/2011	1:59:42 PM	PHl3 MFC set to  0.000000
7/30/2011	1:59:42 PM	SiCl4 MFC set to  0.000000
7/30/2011	1:59:42 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	1:59:42 PM	Tube furnace set to 120
7/30/2011	2:00:12 PM	Helium valve closed
7/30/2011	2:00:12 PM	H2 valve closed
7/30/2011	2:00:12 PM	BCl3 valve closed
7/30/2011	2:00:12 PM	PH3 valve closed
7/30/2011	2:00:12 PM	SiCl4 pre valve closed
7/30/2011	2:00:12 PM	SiCl4 post valve closed
7/30/2011	2:00:12 PM	Bypass valve closed
7/30/2011	2:00:12 PM	Bubbler valve closed
7/30/2011	2:00:12 PM	Main Vac valve opened
7/30/2011	2:00:12 PM	Helium MFC set to  0.000000
7/30/2011	2:00:12 PM	H2 MFC set to  0.000000
7/30/2011	2:00:12 PM	BCl3 MFC set to  0.000000
7/30/2011	2:00:12 PM	PHl3 MFC set to  0.000000
7/30/2011	2:00:12 PM	SiCl4 MFC set to  0.000000
7/30/2011	2:00:12 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	2:00:13 PM	Tube furnace set to 120
7/30/2011	2:00:43 PM	H2 valve closed
7/30/2011	2:00:43 PM	BCl3 valve closed
7/30/2011	2:00:43 PM	PH3 valve closed
7/30/2011	2:00:43 PM	SiCl4 pre valve closed
7/30/2011	2:00:43 PM	SiCl4 post valve closed
7/30/2011	2:00:43 PM	Bypass valve closed
7/30/2011	2:00:43 PM	Bubbler valve closed
7/30/2011	2:00:43 PM	Helium valve opened
7/30/2011	2:00:43 PM	Main Vac valve opened
7/30/2011	2:00:43 PM	Helium MFC set to  20.000000
7/30/2011	2:00:43 PM	H2 MFC set to  0.000000
7/30/2011	2:00:43 PM	BCl3 MFC set to  0.000000
7/30/2011	2:00:43 PM	PHl3 MFC set to  0.000000
7/30/2011	2:00:43 PM	SiCl4 MFC set to  0.000000
7/30/2011	2:00:43 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	2:00:43 PM	Tube furnace set to 120
7/30/2011	2:01:13 PM	Helium valve closed
7/30/2011	2:01:13 PM	H2 valve closed
7/30/2011	2:01:13 PM	BCl3 valve closed
7/30/2011	2:01:13 PM	PH3 valve closed
7/30/2011	2:01:13 PM	SiCl4 pre valve closed
7/30/2011	2:01:13 PM	SiCl4 post valve closed
7/30/2011	2:01:13 PM	Bypass valve closed
7/30/2011	2:01:13 PM	Bubbler valve closed
7/30/2011	2:01:13 PM	Main Vac valve opened
7/30/2011	2:01:13 PM	Helium MFC set to  0.000000
7/30/2011	2:01:13 PM	H2 MFC set to  0.000000
7/30/2011	2:01:13 PM	BCl3 MFC set to  0.000000
7/30/2011	2:01:13 PM	PHl3 MFC set to  0.000000
7/30/2011	2:01:13 PM	SiCl4 MFC set to  0.000000
7/30/2011	2:01:13 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	2:01:13 PM	Tube furnace set to 120
7/30/2011	2:01:43 PM	H2 valve closed
7/30/2011	2:01:43 PM	BCl3 valve closed
7/30/2011	2:01:43 PM	PH3 valve closed
7/30/2011	2:01:43 PM	SiCl4 pre valve closed
7/30/2011	2:01:43 PM	SiCl4 post valve closed
7/30/2011	2:01:43 PM	Bypass valve closed
7/30/2011	2:01:43 PM	Bubbler valve closed
7/30/2011	2:01:43 PM	Helium valve opened
7/30/2011	2:01:43 PM	Main Vac valve opened
7/30/2011	2:01:43 PM	Helium MFC set to  20.000000
7/30/2011	2:01:43 PM	H2 MFC set to  0.000000
7/30/2011	2:01:43 PM	BCl3 MFC set to  0.000000
7/30/2011	2:01:43 PM	PHl3 MFC set to  0.000000
7/30/2011	2:01:43 PM	SiCl4 MFC set to  0.000000
7/30/2011	2:01:43 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	2:01:43 PM	Tube furnace set to 120
7/30/2011	2:02:13 PM	Helium valve closed
7/30/2011	2:02:13 PM	H2 valve closed
7/30/2011	2:02:13 PM	BCl3 valve closed
7/30/2011	2:02:13 PM	PH3 valve closed
7/30/2011	2:02:13 PM	SiCl4 pre valve closed
7/30/2011	2:02:13 PM	SiCl4 post valve closed
7/30/2011	2:02:13 PM	Bypass valve closed
7/30/2011	2:02:13 PM	Bubbler valve closed
7/30/2011	2:02:13 PM	Main Vac valve opened
7/30/2011	2:02:13 PM	Helium MFC set to  0.000000
7/30/2011	2:02:13 PM	H2 MFC set to  0.000000
7/30/2011	2:02:13 PM	BCl3 MFC set to  0.000000
7/30/2011	2:02:13 PM	PHl3 MFC set to  0.000000
7/30/2011	2:02:13 PM	SiCl4 MFC set to  0.000000
7/30/2011	2:02:13 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	2:02:13 PM	Tube furnace set to 120
7/30/2011	2:02:43 PM	H2 valve closed
7/30/2011	2:02:43 PM	BCl3 valve closed
7/30/2011	2:02:43 PM	PH3 valve closed
7/30/2011	2:02:43 PM	SiCl4 pre valve closed
7/30/2011	2:02:43 PM	SiCl4 post valve closed
7/30/2011	2:02:43 PM	Bypass valve closed
7/30/2011	2:02:43 PM	Bubbler valve closed
7/30/2011	2:02:43 PM	Helium valve opened
7/30/2011	2:02:43 PM	Main Vac valve opened
7/30/2011	2:02:43 PM	Helium MFC set to  20.000000
7/30/2011	2:02:43 PM	H2 MFC set to  0.000000
7/30/2011	2:02:43 PM	BCl3 MFC set to  0.000000
7/30/2011	2:02:43 PM	PHl3 MFC set to  0.000000
7/30/2011	2:02:43 PM	SiCl4 MFC set to  0.000000
7/30/2011	2:02:43 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	2:02:44 PM	Tube furnace set to 120
7/30/2011	2:03:14 PM	Helium valve closed
7/30/2011	2:03:14 PM	H2 valve closed
7/30/2011	2:03:14 PM	BCl3 valve closed
7/30/2011	2:03:14 PM	PH3 valve closed
7/30/2011	2:03:14 PM	SiCl4 pre valve closed
7/30/2011	2:03:14 PM	SiCl4 post valve closed
7/30/2011	2:03:14 PM	Bypass valve closed
7/30/2011	2:03:14 PM	Bubbler valve closed
7/30/2011	2:03:14 PM	Main Vac valve opened
7/30/2011	2:03:14 PM	Helium MFC set to  0.000000
7/30/2011	2:03:14 PM	H2 MFC set to  0.000000
7/30/2011	2:03:14 PM	BCl3 MFC set to  0.000000
7/30/2011	2:03:14 PM	PHl3 MFC set to  0.000000
7/30/2011	2:03:14 PM	SiCl4 MFC set to  0.000000
7/30/2011	2:03:14 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	2:03:14 PM	Tube furnace set to 120
7/30/2011	2:03:15 PM	Run finished at 2:03 PM
7/30/2011	2:39:09 PM	Main Vac valve closed
7/30/2011	2:39:33 PM	Main Vac valve opened
7/30/2011	2:43:13 PM	Recipe started at 2:43 PM
7/30/2011	2:43:13 PM	Helium valve closed
7/30/2011	2:43:13 PM	H2 valve closed
7/30/2011	2:43:13 PM	BCl3 valve closed
7/30/2011	2:43:13 PM	PH3 valve closed
7/30/2011	2:43:13 PM	SiCl4 pre valve closed
7/30/2011	2:43:13 PM	SiCl4 post valve closed
7/30/2011	2:43:13 PM	Main Vac valve closed
7/30/2011	2:43:13 PM	Bypass valve closed
7/30/2011	2:43:13 PM	Bubbler valve closed
7/30/2011	2:43:13 PM	Helium MFC set to  0.000000
7/30/2011	2:43:13 PM	H2 MFC set to  0.000000
7/30/2011	2:43:13 PM	BCl3 MFC set to  0.000000
7/30/2011	2:43:13 PM	PHl3 MFC set to  0.000000
7/30/2011	2:43:13 PM	SiCl4 MFC set to  0.000000
7/30/2011	2:43:13 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	2:43:13 PM	Tube furnace set to 1000
7/30/2011	2:43:16 PM	Helium valve closed
7/30/2011	2:43:16 PM	BCl3 valve closed
7/30/2011	2:43:16 PM	PH3 valve closed
7/30/2011	2:43:16 PM	SiCl4 pre valve closed
7/30/2011	2:43:16 PM	SiCl4 post valve closed
7/30/2011	2:43:16 PM	Main Vac valve closed
7/30/2011	2:43:16 PM	Bypass valve closed
7/30/2011	2:43:16 PM	Bubbler valve closed
7/30/2011	2:43:16 PM	H2 valve opened
7/30/2011	2:43:16 PM	Helium MFC set to  0.000000
7/30/2011	2:43:16 PM	H2 MFC set to  500.000000
7/30/2011	2:43:16 PM	BCl3 MFC set to  0.000000
7/30/2011	2:43:16 PM	PHl3 MFC set to  0.000000
7/30/2011	2:43:16 PM	SiCl4 MFC set to  0.000000
7/30/2011	2:43:16 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	2:43:17 PM	Tube furnace set to 1000
7/30/2011	2:44:19 PM	Helium valve closed
7/30/2011	2:44:19 PM	BCl3 valve closed
7/30/2011	2:44:19 PM	PH3 valve closed
7/30/2011	2:44:19 PM	SiCl4 pre valve closed
7/30/2011	2:44:19 PM	SiCl4 post valve closed
7/30/2011	2:44:19 PM	Main Vac valve closed
7/30/2011	2:44:19 PM	Bypass valve closed
7/30/2011	2:44:19 PM	H2 valve opened
7/30/2011	2:44:19 PM	Bubbler valve opened
7/30/2011	2:44:19 PM	Helium MFC set to  0.000000
7/30/2011	2:44:19 PM	H2 MFC set to  500.000000
7/30/2011	2:44:19 PM	BCl3 MFC set to  0.000000
7/30/2011	2:44:19 PM	PHl3 MFC set to  0.000000
7/30/2011	2:44:19 PM	SiCl4 MFC set to  0.000000
7/30/2011	2:44:19 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	2:44:20 PM	Tube furnace set to 1000
7/30/2011	2:44:21 PM	Helium valve closed
7/30/2011	2:44:21 PM	BCl3 valve closed
7/30/2011	2:44:21 PM	PH3 valve closed
7/30/2011	2:44:21 PM	SiCl4 pre valve closed
7/30/2011	2:44:21 PM	SiCl4 post valve closed
7/30/2011	2:44:21 PM	Main Vac valve closed
7/30/2011	2:44:21 PM	Bypass valve closed
7/30/2011	2:44:21 PM	H2 valve opened
7/30/2011	2:44:21 PM	Bubbler valve opened
7/30/2011	2:44:21 PM	Helium MFC set to  0.000000
7/30/2011	2:44:21 PM	H2 MFC set to  500.000000
7/30/2011	2:44:21 PM	BCl3 MFC set to  0.000000
7/30/2011	2:44:21 PM	PHl3 MFC set to  0.000000
7/30/2011	2:44:21 PM	SiCl4 MFC set to  0.000000
7/30/2011	2:44:21 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	2:44:21 PM	Tube furnace set to 1000
7/30/2011	3:04:21 PM	Helium valve closed
7/30/2011	3:04:21 PM	PH3 valve closed
7/30/2011	3:04:21 PM	Main Vac valve closed
7/30/2011	3:04:21 PM	Bypass valve closed
7/30/2011	3:04:21 PM	H2 valve opened
7/30/2011	3:04:21 PM	BCl3 valve opened
7/30/2011	3:04:21 PM	SiCl4 pre valve opened
7/30/2011	3:04:21 PM	SiCl4 post valve opened
7/30/2011	3:04:21 PM	Bubbler valve opened
7/30/2011	3:04:21 PM	Helium MFC set to  0.000000
7/30/2011	3:04:21 PM	H2 MFC set to  500.000000
7/30/2011	3:04:21 PM	BCl3 MFC set to  2.000000
7/30/2011	3:04:21 PM	PHl3 MFC set to  0.000000
7/30/2011	3:04:21 PM	SiCl4 MFC set to  50.000000
7/30/2011	3:04:21 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	3:04:21 PM	Tube furnace set to 1000
7/30/2011	3:24:21 PM	Helium valve closed
7/30/2011	3:24:21 PM	BCl3 valve closed
7/30/2011	3:24:21 PM	PH3 valve closed
7/30/2011	3:24:21 PM	SiCl4 pre valve closed
7/30/2011	3:24:21 PM	SiCl4 post valve closed
7/30/2011	3:24:21 PM	Main Vac valve closed
7/30/2011	3:24:21 PM	Bypass valve closed
7/30/2011	3:24:21 PM	H2 valve opened
7/30/2011	3:24:21 PM	Bubbler valve opened
7/30/2011	3:24:21 PM	Helium MFC set to  0.000000
7/30/2011	3:24:21 PM	H2 MFC set to  500.000000
7/30/2011	3:24:21 PM	BCl3 MFC set to  0.000000
7/30/2011	3:24:21 PM	PHl3 MFC set to  0.000000
7/30/2011	3:24:21 PM	SiCl4 MFC set to  0.000000
7/30/2011	3:24:21 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	3:24:21 PM	Tube furnace set to 975
7/30/2011	3:24:51 PM	Helium valve closed
7/30/2011	3:24:51 PM	BCl3 valve closed
7/30/2011	3:24:51 PM	PH3 valve closed
7/30/2011	3:24:51 PM	SiCl4 pre valve closed
7/30/2011	3:24:51 PM	SiCl4 post valve closed
7/30/2011	3:24:51 PM	Main Vac valve closed
7/30/2011	3:24:51 PM	Bypass valve closed
7/30/2011	3:24:51 PM	H2 valve opened
7/30/2011	3:24:51 PM	Bubbler valve opened
7/30/2011	3:24:51 PM	Helium MFC set to  0.000000
7/30/2011	3:24:51 PM	H2 MFC set to  500.000000
7/30/2011	3:24:51 PM	BCl3 MFC set to  0.000000
7/30/2011	3:24:51 PM	PHl3 MFC set to  0.000000
7/30/2011	3:24:51 PM	SiCl4 MFC set to  0.000000
7/30/2011	3:24:51 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	3:24:51 PM	Tube furnace set to 950
7/30/2011	3:25:21 PM	Helium valve closed
7/30/2011	3:25:21 PM	BCl3 valve closed
7/30/2011	3:25:21 PM	PH3 valve closed
7/30/2011	3:25:21 PM	SiCl4 pre valve closed
7/30/2011	3:25:21 PM	SiCl4 post valve closed
7/30/2011	3:25:21 PM	Main Vac valve closed
7/30/2011	3:25:21 PM	Bypass valve closed
7/30/2011	3:25:21 PM	H2 valve opened
7/30/2011	3:25:21 PM	Bubbler valve opened
7/30/2011	3:25:21 PM	Helium MFC set to  0.000000
7/30/2011	3:25:21 PM	H2 MFC set to  500.000000
7/30/2011	3:25:21 PM	BCl3 MFC set to  0.000000
7/30/2011	3:25:21 PM	PHl3 MFC set to  0.000000
7/30/2011	3:25:21 PM	SiCl4 MFC set to  0.000000
7/30/2011	3:25:21 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	3:25:22 PM	Tube furnace set to 925
7/30/2011	3:25:52 PM	Helium valve closed
7/30/2011	3:25:52 PM	BCl3 valve closed
7/30/2011	3:25:52 PM	PH3 valve closed
7/30/2011	3:25:52 PM	SiCl4 pre valve closed
7/30/2011	3:25:52 PM	SiCl4 post valve closed
7/30/2011	3:25:52 PM	Main Vac valve closed
7/30/2011	3:25:52 PM	Bypass valve closed
7/30/2011	3:25:52 PM	H2 valve opened
7/30/2011	3:25:52 PM	Bubbler valve opened
7/30/2011	3:25:52 PM	Helium MFC set to  0.000000
7/30/2011	3:25:52 PM	H2 MFC set to  500.000000
7/30/2011	3:25:52 PM	BCl3 MFC set to  0.000000
7/30/2011	3:25:52 PM	PHl3 MFC set to  0.000000
7/30/2011	3:25:52 PM	SiCl4 MFC set to  0.000000
7/30/2011	3:25:52 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	3:25:52 PM	Tube furnace set to 900
7/30/2011	3:26:22 PM	Helium valve closed
7/30/2011	3:26:22 PM	BCl3 valve closed
7/30/2011	3:26:22 PM	PH3 valve closed
7/30/2011	3:26:22 PM	SiCl4 pre valve closed
7/30/2011	3:26:22 PM	SiCl4 post valve closed
7/30/2011	3:26:22 PM	Main Vac valve closed
7/30/2011	3:26:22 PM	Bypass valve closed
7/30/2011	3:26:22 PM	H2 valve opened
7/30/2011	3:26:22 PM	Bubbler valve opened
7/30/2011	3:26:22 PM	Helium MFC set to  0.000000
7/30/2011	3:26:22 PM	H2 MFC set to  500.000000
7/30/2011	3:26:22 PM	BCl3 MFC set to  0.000000
7/30/2011	3:26:22 PM	PHl3 MFC set to  0.000000
7/30/2011	3:26:22 PM	SiCl4 MFC set to  0.000000
7/30/2011	3:26:22 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	3:26:22 PM	Tube furnace set to 850
7/30/2011	3:27:22 PM	Helium valve closed
7/30/2011	3:27:22 PM	BCl3 valve closed
7/30/2011	3:27:22 PM	PH3 valve closed
7/30/2011	3:27:22 PM	SiCl4 pre valve closed
7/30/2011	3:27:22 PM	SiCl4 post valve closed
7/30/2011	3:27:22 PM	Main Vac valve closed
7/30/2011	3:27:22 PM	Bypass valve closed
7/30/2011	3:27:22 PM	H2 valve opened
7/30/2011	3:27:22 PM	Bubbler valve opened
7/30/2011	3:27:22 PM	Helium MFC set to  0.000000
7/30/2011	3:27:22 PM	H2 MFC set to  500.000000
7/30/2011	3:27:22 PM	BCl3 MFC set to  0.000000
7/30/2011	3:27:22 PM	PHl3 MFC set to  0.000000
7/30/2011	3:27:22 PM	SiCl4 MFC set to  0.000000
7/30/2011	3:27:22 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	3:27:22 PM	Tube furnace set to 800
7/30/2011	3:28:22 PM	Helium valve closed
7/30/2011	3:28:22 PM	BCl3 valve closed
7/30/2011	3:28:22 PM	PH3 valve closed
7/30/2011	3:28:22 PM	SiCl4 pre valve closed
7/30/2011	3:28:22 PM	SiCl4 post valve closed
7/30/2011	3:28:22 PM	Main Vac valve closed
7/30/2011	3:28:22 PM	Bypass valve closed
7/30/2011	3:28:22 PM	H2 valve opened
7/30/2011	3:28:22 PM	Bubbler valve opened
7/30/2011	3:28:22 PM	Helium MFC set to  0.000000
7/30/2011	3:28:22 PM	H2 MFC set to  500.000000
7/30/2011	3:28:22 PM	BCl3 MFC set to  0.000000
7/30/2011	3:28:22 PM	PHl3 MFC set to  0.000000
7/30/2011	3:28:22 PM	SiCl4 MFC set to  0.000000
7/30/2011	3:28:22 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	3:28:22 PM	Tube furnace set to 750
7/30/2011	3:29:22 PM	H2 valve closed
7/30/2011	3:29:22 PM	BCl3 valve closed
7/30/2011	3:29:22 PM	PH3 valve closed
7/30/2011	3:29:22 PM	SiCl4 pre valve closed
7/30/2011	3:29:22 PM	SiCl4 post valve closed
7/30/2011	3:29:22 PM	Main Vac valve closed
7/30/2011	3:29:22 PM	Bypass valve closed
7/30/2011	3:29:22 PM	Helium valve opened
7/30/2011	3:29:22 PM	Bubbler valve opened
7/30/2011	3:29:22 PM	Helium MFC set to  500.000000
7/30/2011	3:29:22 PM	H2 MFC set to  0.000000
7/30/2011	3:29:22 PM	BCl3 MFC set to  0.000000
7/30/2011	3:29:22 PM	PHl3 MFC set to  0.000000
7/30/2011	3:29:22 PM	SiCl4 MFC set to  0.000000
7/30/2011	3:29:22 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	3:29:23 PM	Tube furnace set to 700
7/30/2011	3:30:53 PM	H2 valve closed
7/30/2011	3:30:53 PM	BCl3 valve closed
7/30/2011	3:30:53 PM	PH3 valve closed
7/30/2011	3:30:53 PM	SiCl4 pre valve closed
7/30/2011	3:30:53 PM	SiCl4 post valve closed
7/30/2011	3:30:53 PM	Main Vac valve closed
7/30/2011	3:30:53 PM	Bypass valve closed
7/30/2011	3:30:53 PM	Helium valve opened
7/30/2011	3:30:53 PM	Bubbler valve opened
7/30/2011	3:30:53 PM	Helium MFC set to  500.000000
7/30/2011	3:30:53 PM	H2 MFC set to  0.000000
7/30/2011	3:30:53 PM	BCl3 MFC set to  0.000000
7/30/2011	3:30:53 PM	PHl3 MFC set to  0.000000
7/30/2011	3:30:53 PM	SiCl4 MFC set to  0.000000
7/30/2011	3:30:53 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	3:30:53 PM	Tube furnace set to 0
7/30/2011	3:50:53 PM	Helium valve closed
7/30/2011	3:50:53 PM	H2 valve closed
7/30/2011	3:50:53 PM	BCl3 valve closed
7/30/2011	3:50:53 PM	PH3 valve closed
7/30/2011	3:50:53 PM	SiCl4 pre valve closed
7/30/2011	3:50:53 PM	SiCl4 post valve closed
7/30/2011	3:50:53 PM	Main Vac valve closed
7/30/2011	3:50:53 PM	Bypass valve closed
7/30/2011	3:50:53 PM	Bubbler valve closed
7/30/2011	3:50:53 PM	Helium MFC set to  0.000000
7/30/2011	3:50:53 PM	H2 MFC set to  0.000000
7/30/2011	3:50:53 PM	BCl3 MFC set to  0.000000
7/30/2011	3:50:53 PM	PHl3 MFC set to  0.000000
7/30/2011	3:50:53 PM	SiCl4 MFC set to  0.000000
7/30/2011	3:50:53 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	3:50:53 PM	Tube furnace set to 0
7/30/2011	3:50:54 PM	Run finished at 3:50 PM
7/30/2011	4:54:51 PM	Program started after a nonstandard shutdown
7/30/2011	4:54:52 PM	Helium valve closed
7/30/2011	4:54:52 PM	H2 valve closed
7/30/2011	4:54:52 PM	BCl3 valve closed
7/30/2011	4:54:52 PM	PH3 valve closed
7/30/2011	4:54:52 PM	SiCl4 pre valve closed
7/30/2011	4:54:52 PM	SiCl4 post valve closed
7/30/2011	4:54:52 PM	Main Vac valve closed
7/30/2011	4:54:52 PM	Bypass valve closed
7/30/2011	4:54:52 PM	Bubbler valve closed
7/30/2011	4:54:52 PM	Helium MFC set to  0.000000
7/30/2011	4:54:52 PM	H2 MFC set to  0.000000
7/30/2011	4:54:52 PM	BCl3 MFC set to  0.000000
7/30/2011	4:54:52 PM	PHl3 MFC set to  0.000000
7/30/2011	4:54:52 PM	SiCl4 MFC set to  0.000000
7/30/2011	4:54:52 PM	Bypass solenoid MFC set to  760.000000
7/30/2011	4:54:52 PM	Tube furnace set to 0
7/30/2011	4:55:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/30/2011	4:55:06 PM	Recipe started at 4:55 PM
7/30/2011	4:55:06 PM	Helium valve closed
7/30/2011	4:55:06 PM	H2 valve closed
7/30/2011	4:55:06 PM	BCl3 valve closed
7/30/2011	4:55:06 PM	PH3 valve closed
7/30/2011	4:55:06 PM	SiCl4 pre valve closed
7/30/2011	4:55:06 PM	SiCl4 post valve closed
7/30/2011	4:55:06 PM	Main Vac valve closed
7/30/2011	4:55:06 PM	Bypass valve closed
7/30/2011	4:55:06 PM	Bubbler valve closed
7/30/2011	4:55:06 PM	Helium MFC set to  0.000000
7/30/2011	4:55:06 PM	H2 MFC set to  0.000000
7/30/2011	4:55:06 PM	BCl3 MFC set to  0.000000
7/30/2011	4:55:06 PM	PHl3 MFC set to  0.000000
7/30/2011	4:55:06 PM	SiCl4 MFC set to  0.000000
7/30/2011	4:55:06 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	4:55:07 PM	Tube furnace set to 0
7/30/2011	4:55:10 PM	H2 valve closed
7/30/2011	4:55:10 PM	BCl3 valve closed
7/30/2011	4:55:10 PM	PH3 valve closed
7/30/2011	4:55:10 PM	SiCl4 pre valve closed
7/30/2011	4:55:10 PM	SiCl4 post valve closed
7/30/2011	4:55:10 PM	Main Vac valve closed
7/30/2011	4:55:10 PM	Bypass valve closed
7/30/2011	4:55:10 PM	Bubbler valve closed
7/30/2011	4:55:10 PM	Helium valve opened
7/30/2011	4:55:10 PM	Helium MFC set to  500.000000
7/30/2011	4:55:10 PM	H2 MFC set to  0.000000
7/30/2011	4:55:10 PM	BCl3 MFC set to  0.000000
7/30/2011	4:55:10 PM	PHl3 MFC set to  0.000000
7/30/2011	4:55:10 PM	SiCl4 MFC set to  0.000000
7/30/2011	4:55:10 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	4:55:10 PM	Tube furnace set to 0
7/30/2011	4:55:18 PM	Helium valve closed
7/30/2011	4:55:18 PM	H2 valve closed
7/30/2011	4:55:18 PM	BCl3 valve closed
7/30/2011	4:55:18 PM	PH3 valve closed
7/30/2011	4:55:18 PM	SiCl4 pre valve closed
7/30/2011	4:55:18 PM	SiCl4 post valve closed
7/30/2011	4:55:18 PM	Main Vac valve closed
7/30/2011	4:55:18 PM	Bypass valve closed
7/30/2011	4:55:18 PM	Bubbler valve closed
7/30/2011	4:55:18 PM	Helium MFC set to  0.000000
7/30/2011	4:55:18 PM	H2 MFC set to  0.000000
7/30/2011	4:55:18 PM	BCl3 MFC set to  0.000000
7/30/2011	4:55:18 PM	PHl3 MFC set to  0.000000
7/30/2011	4:55:18 PM	SiCl4 MFC set to  0.000000
7/30/2011	4:55:18 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	4:55:18 PM	Tube furnace set to 0
7/30/2011	4:55:19 PM	Run finished at 4:55 PM
7/30/2011	4:55:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/30/2011	5:00:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/30/2011	5:00:34 PM	Recipe started at 5:00 PM
7/30/2011	5:00:34 PM	Helium valve closed
7/30/2011	5:00:34 PM	H2 valve closed
7/30/2011	5:00:34 PM	BCl3 valve closed
7/30/2011	5:00:34 PM	PH3 valve closed
7/30/2011	5:00:34 PM	SiCl4 pre valve closed
7/30/2011	5:00:34 PM	SiCl4 post valve closed
7/30/2011	5:00:34 PM	Main Vac valve closed
7/30/2011	5:00:34 PM	Bubbler valve closed
7/30/2011	5:00:34 PM	Bypass valve opened
7/30/2011	5:00:34 PM	Helium MFC set to  0.000000
7/30/2011	5:00:34 PM	H2 MFC set to  0.000000
7/30/2011	5:00:34 PM	BCl3 MFC set to  0.000000
7/30/2011	5:00:34 PM	PHl3 MFC set to  0.000000
7/30/2011	5:00:34 PM	SiCl4 MFC set to  0.000000
7/30/2011	5:00:34 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	5:00:34 PM	Tube furnace set to 0
7/30/2011	5:01:12 PM	Run aborted at 5:01 PM
7/30/2011	5:01:12 PM	Helium valve closed
7/30/2011	5:01:12 PM	H2 valve closed
7/30/2011	5:01:12 PM	BCl3 valve closed
7/30/2011	5:01:12 PM	PH3 valve closed
7/30/2011	5:01:12 PM	SiCl4 pre valve closed
7/30/2011	5:01:12 PM	SiCl4 post valve closed
7/30/2011	5:01:12 PM	Bypass valve closed
7/30/2011	5:01:12 PM	Main Vac valve closed
7/30/2011	5:01:12 PM	Bubbler valve closed
7/30/2011	5:01:12 PM	Helium MFC set to  0.000000
7/30/2011	5:01:12 PM	H2 MFC set to  0.000000
7/30/2011	5:01:12 PM	BCl3 MFC set to  0.000000
7/30/2011	5:01:12 PM	PHl3 MFC set to  0.000000
7/30/2011	5:01:12 PM	SiCl4 MFC set to  0.000000
7/30/2011	5:01:12 PM	Tube furnace set to 0
7/30/2011	5:01:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/30/2011	5:01:14 PM	Bypass valve opened
7/30/2011	5:02:52 PM	Recipe started at 5:02 PM
7/30/2011	5:02:52 PM	Helium valve closed
7/30/2011	5:02:52 PM	H2 valve closed
7/30/2011	5:02:52 PM	BCl3 valve closed
7/30/2011	5:02:52 PM	PH3 valve closed
7/30/2011	5:02:52 PM	SiCl4 pre valve closed
7/30/2011	5:02:52 PM	SiCl4 post valve closed
7/30/2011	5:02:52 PM	Main Vac valve closed
7/30/2011	5:02:52 PM	Bubbler valve closed
7/30/2011	5:02:52 PM	Bypass valve opened
7/30/2011	5:02:52 PM	Helium MFC set to  0.000000
7/30/2011	5:02:52 PM	H2 MFC set to  0.000000
7/30/2011	5:02:52 PM	BCl3 MFC set to  0.000000
7/30/2011	5:02:52 PM	PHl3 MFC set to  0.000000
7/30/2011	5:02:52 PM	SiCl4 MFC set to  0.000000
7/30/2011	5:02:52 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	5:02:52 PM	Tube furnace set to 0
7/30/2011	5:02:52 PM	Helium valve closed
7/30/2011	5:02:52 PM	H2 valve closed
7/30/2011	5:02:52 PM	BCl3 valve closed
7/30/2011	5:02:53 PM	PH3 valve closed
7/30/2011	5:02:53 PM	SiCl4 pre valve closed
7/30/2011	5:02:53 PM	SiCl4 post valve closed
7/30/2011	5:02:53 PM	Main Vac valve closed
7/30/2011	5:02:53 PM	Bubbler valve closed
7/30/2011	5:02:53 PM	Bypass valve opened
7/30/2011	5:02:53 PM	Helium MFC set to  0.000000
7/30/2011	5:02:53 PM	H2 MFC set to  0.000000
7/30/2011	5:02:53 PM	BCl3 MFC set to  0.000000
7/30/2011	5:02:53 PM	PHl3 MFC set to  0.000000
7/30/2011	5:02:53 PM	SiCl4 MFC set to  0.000000
7/30/2011	5:02:53 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	5:02:53 PM	Tube furnace set to 0
7/30/2011	5:03:23 PM	Helium valve closed
7/30/2011	5:03:23 PM	H2 valve closed
7/30/2011	5:03:23 PM	BCl3 valve closed
7/30/2011	5:03:23 PM	PH3 valve closed
7/30/2011	5:03:23 PM	SiCl4 pre valve closed
7/30/2011	5:03:23 PM	SiCl4 post valve closed
7/30/2011	5:03:23 PM	Bypass valve closed
7/30/2011	5:03:23 PM	Bubbler valve closed
7/30/2011	5:03:23 PM	Main Vac valve opened
7/30/2011	5:03:23 PM	Helium MFC set to  0.000000
7/30/2011	5:03:23 PM	H2 MFC set to  0.000000
7/30/2011	5:03:23 PM	BCl3 MFC set to  0.000000
7/30/2011	5:03:23 PM	PHl3 MFC set to  0.000000
7/30/2011	5:03:23 PM	SiCl4 MFC set to  0.000000
7/30/2011	5:03:23 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	5:03:23 PM	Tube furnace set to 0
7/30/2011	5:03:35 PM	Run aborted at 5:03 PM
7/30/2011	5:03:35 PM	Helium valve closed
7/30/2011	5:03:35 PM	H2 valve closed
7/30/2011	5:03:35 PM	BCl3 valve closed
7/30/2011	5:03:35 PM	PH3 valve closed
7/30/2011	5:03:35 PM	SiCl4 pre valve closed
7/30/2011	5:03:35 PM	SiCl4 post valve closed
7/30/2011	5:03:35 PM	Bypass valve closed
7/30/2011	5:03:35 PM	Main Vac valve closed
7/30/2011	5:03:35 PM	Bubbler valve closed
7/30/2011	5:03:35 PM	Helium MFC set to  0.000000
7/30/2011	5:03:35 PM	H2 MFC set to  0.000000
7/30/2011	5:03:35 PM	BCl3 MFC set to  0.000000
7/30/2011	5:03:35 PM	PHl3 MFC set to  0.000000
7/30/2011	5:03:35 PM	SiCl4 MFC set to  0.000000
7/30/2011	5:03:35 PM	Tube furnace set to 0
7/30/2011	5:03:37 PM	Main Vac valve opened
7/30/2011	5:06:07 PM	Recipe started at 5:06 PM
7/30/2011	5:06:07 PM	Helium valve closed
7/30/2011	5:06:07 PM	H2 valve closed
7/30/2011	5:06:07 PM	BCl3 valve closed
7/30/2011	5:06:07 PM	PH3 valve closed
7/30/2011	5:06:07 PM	SiCl4 pre valve closed
7/30/2011	5:06:07 PM	SiCl4 post valve closed
7/30/2011	5:06:07 PM	Bypass valve closed
7/30/2011	5:06:07 PM	Bubbler valve closed
7/30/2011	5:06:07 PM	Main Vac valve opened
7/30/2011	5:06:07 PM	Helium MFC set to  0.000000
7/30/2011	5:06:07 PM	H2 MFC set to  0.000000
7/30/2011	5:06:07 PM	BCl3 MFC set to  0.000000
7/30/2011	5:06:07 PM	PHl3 MFC set to  0.000000
7/30/2011	5:06:07 PM	SiCl4 MFC set to  0.000000
7/30/2011	5:06:07 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	5:06:07 PM	Tube furnace set to 0
7/30/2011	5:16:07 PM	H2 valve closed
7/30/2011	5:16:07 PM	BCl3 valve closed
7/30/2011	5:16:07 PM	PH3 valve closed
7/30/2011	5:16:07 PM	SiCl4 pre valve closed
7/30/2011	5:16:07 PM	SiCl4 post valve closed
7/30/2011	5:16:07 PM	Bypass valve closed
7/30/2011	5:16:07 PM	Bubbler valve closed
7/30/2011	5:16:07 PM	Helium valve opened
7/30/2011	5:16:07 PM	Main Vac valve opened
7/30/2011	5:16:07 PM	Helium MFC set to  20.000000
7/30/2011	5:16:07 PM	H2 MFC set to  0.000000
7/30/2011	5:16:07 PM	BCl3 MFC set to  0.000000
7/30/2011	5:16:07 PM	PHl3 MFC set to  0.000000
7/30/2011	5:16:07 PM	SiCl4 MFC set to  0.000000
7/30/2011	5:16:07 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	5:16:07 PM	Tube furnace set to 0
7/30/2011	5:16:37 PM	Helium valve closed
7/30/2011	5:16:37 PM	H2 valve closed
7/30/2011	5:16:37 PM	BCl3 valve closed
7/30/2011	5:16:37 PM	PH3 valve closed
7/30/2011	5:16:37 PM	SiCl4 pre valve closed
7/30/2011	5:16:37 PM	SiCl4 post valve closed
7/30/2011	5:16:37 PM	Bypass valve closed
7/30/2011	5:16:37 PM	Bubbler valve closed
7/30/2011	5:16:37 PM	Main Vac valve opened
7/30/2011	5:16:37 PM	Helium MFC set to  0.000000
7/30/2011	5:16:37 PM	H2 MFC set to  0.000000
7/30/2011	5:16:37 PM	BCl3 MFC set to  0.000000
7/30/2011	5:16:37 PM	PHl3 MFC set to  0.000000
7/30/2011	5:16:37 PM	SiCl4 MFC set to  0.000000
7/30/2011	5:16:37 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	5:16:37 PM	Tube furnace set to 0
7/30/2011	5:17:07 PM	H2 valve closed
7/30/2011	5:17:07 PM	BCl3 valve closed
7/30/2011	5:17:07 PM	PH3 valve closed
7/30/2011	5:17:07 PM	SiCl4 pre valve closed
7/30/2011	5:17:07 PM	SiCl4 post valve closed
7/30/2011	5:17:07 PM	Bypass valve closed
7/30/2011	5:17:07 PM	Bubbler valve closed
7/30/2011	5:17:07 PM	Helium valve opened
7/30/2011	5:17:07 PM	Main Vac valve opened
7/30/2011	5:17:07 PM	Helium MFC set to  20.000000
7/30/2011	5:17:07 PM	H2 MFC set to  0.000000
7/30/2011	5:17:07 PM	BCl3 MFC set to  0.000000
7/30/2011	5:17:07 PM	PHl3 MFC set to  0.000000
7/30/2011	5:17:07 PM	SiCl4 MFC set to  0.000000
7/30/2011	5:17:07 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	5:17:08 PM	Tube furnace set to 0
7/30/2011	5:17:38 PM	Helium valve closed
7/30/2011	5:17:38 PM	H2 valve closed
7/30/2011	5:17:38 PM	BCl3 valve closed
7/30/2011	5:17:38 PM	PH3 valve closed
7/30/2011	5:17:38 PM	SiCl4 pre valve closed
7/30/2011	5:17:38 PM	SiCl4 post valve closed
7/30/2011	5:17:38 PM	Bypass valve closed
7/30/2011	5:17:38 PM	Bubbler valve closed
7/30/2011	5:17:38 PM	Main Vac valve opened
7/30/2011	5:17:38 PM	Helium MFC set to  0.000000
7/30/2011	5:17:38 PM	H2 MFC set to  0.000000
7/30/2011	5:17:38 PM	BCl3 MFC set to  0.000000
7/30/2011	5:17:38 PM	PHl3 MFC set to  0.000000
7/30/2011	5:17:38 PM	SiCl4 MFC set to  0.000000
7/30/2011	5:17:38 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	5:17:38 PM	Tube furnace set to 0
7/30/2011	5:18:08 PM	H2 valve closed
7/30/2011	5:18:08 PM	BCl3 valve closed
7/30/2011	5:18:08 PM	PH3 valve closed
7/30/2011	5:18:08 PM	SiCl4 pre valve closed
7/30/2011	5:18:08 PM	SiCl4 post valve closed
7/30/2011	5:18:08 PM	Bypass valve closed
7/30/2011	5:18:08 PM	Bubbler valve closed
7/30/2011	5:18:08 PM	Helium valve opened
7/30/2011	5:18:08 PM	Main Vac valve opened
7/30/2011	5:18:08 PM	Helium MFC set to  20.000000
7/30/2011	5:18:08 PM	H2 MFC set to  0.000000
7/30/2011	5:18:08 PM	BCl3 MFC set to  0.000000
7/30/2011	5:18:08 PM	PHl3 MFC set to  0.000000
7/30/2011	5:18:08 PM	SiCl4 MFC set to  0.000000
7/30/2011	5:18:08 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	5:18:08 PM	Tube furnace set to 0
7/30/2011	5:18:38 PM	Helium valve closed
7/30/2011	5:18:38 PM	H2 valve closed
7/30/2011	5:18:38 PM	BCl3 valve closed
7/30/2011	5:18:38 PM	PH3 valve closed
7/30/2011	5:18:38 PM	SiCl4 pre valve closed
7/30/2011	5:18:38 PM	SiCl4 post valve closed
7/30/2011	5:18:38 PM	Bypass valve closed
7/30/2011	5:18:38 PM	Bubbler valve closed
7/30/2011	5:18:38 PM	Main Vac valve opened
7/30/2011	5:18:38 PM	Helium MFC set to  0.000000
7/30/2011	5:18:38 PM	H2 MFC set to  0.000000
7/30/2011	5:18:38 PM	BCl3 MFC set to  0.000000
7/30/2011	5:18:38 PM	PHl3 MFC set to  0.000000
7/30/2011	5:18:38 PM	SiCl4 MFC set to  0.000000
7/30/2011	5:18:38 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	5:18:38 PM	Tube furnace set to 0
7/30/2011	5:19:08 PM	H2 valve closed
7/30/2011	5:19:08 PM	BCl3 valve closed
7/30/2011	5:19:08 PM	PH3 valve closed
7/30/2011	5:19:08 PM	SiCl4 pre valve closed
7/30/2011	5:19:08 PM	SiCl4 post valve closed
7/30/2011	5:19:08 PM	Bypass valve closed
7/30/2011	5:19:08 PM	Bubbler valve closed
7/30/2011	5:19:08 PM	Helium valve opened
7/30/2011	5:19:08 PM	Main Vac valve opened
7/30/2011	5:19:08 PM	Helium MFC set to  20.000000
7/30/2011	5:19:08 PM	H2 MFC set to  0.000000
7/30/2011	5:19:08 PM	BCl3 MFC set to  0.000000
7/30/2011	5:19:08 PM	PHl3 MFC set to  0.000000
7/30/2011	5:19:08 PM	SiCl4 MFC set to  0.000000
7/30/2011	5:19:08 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	5:19:08 PM	Tube furnace set to 0
7/30/2011	5:19:38 PM	Helium valve closed
7/30/2011	5:19:38 PM	H2 valve closed
7/30/2011	5:19:38 PM	BCl3 valve closed
7/30/2011	5:19:38 PM	PH3 valve closed
7/30/2011	5:19:38 PM	SiCl4 pre valve closed
7/30/2011	5:19:38 PM	SiCl4 post valve closed
7/30/2011	5:19:38 PM	Bypass valve closed
7/30/2011	5:19:38 PM	Bubbler valve closed
7/30/2011	5:19:38 PM	Main Vac valve opened
7/30/2011	5:19:38 PM	Helium MFC set to  0.000000
7/30/2011	5:19:38 PM	H2 MFC set to  0.000000
7/30/2011	5:19:38 PM	BCl3 MFC set to  0.000000
7/30/2011	5:19:38 PM	PHl3 MFC set to  0.000000
7/30/2011	5:19:38 PM	SiCl4 MFC set to  0.000000
7/30/2011	5:19:38 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	5:19:39 PM	Tube furnace set to 0
7/30/2011	5:20:09 PM	H2 valve closed
7/30/2011	5:20:09 PM	BCl3 valve closed
7/30/2011	5:20:09 PM	PH3 valve closed
7/30/2011	5:20:09 PM	SiCl4 pre valve closed
7/30/2011	5:20:09 PM	SiCl4 post valve closed
7/30/2011	5:20:09 PM	Bypass valve closed
7/30/2011	5:20:09 PM	Bubbler valve closed
7/30/2011	5:20:09 PM	Helium valve opened
7/30/2011	5:20:09 PM	Main Vac valve opened
7/30/2011	5:20:09 PM	Helium MFC set to  20.000000
7/30/2011	5:20:09 PM	H2 MFC set to  0.000000
7/30/2011	5:20:09 PM	BCl3 MFC set to  0.000000
7/30/2011	5:20:09 PM	PHl3 MFC set to  0.000000
7/30/2011	5:20:09 PM	SiCl4 MFC set to  0.000000
7/30/2011	5:20:09 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	5:20:09 PM	Tube furnace set to 120
7/30/2011	5:20:39 PM	Helium valve closed
7/30/2011	5:20:39 PM	H2 valve closed
7/30/2011	5:20:39 PM	BCl3 valve closed
7/30/2011	5:20:39 PM	PH3 valve closed
7/30/2011	5:20:39 PM	SiCl4 pre valve closed
7/30/2011	5:20:39 PM	SiCl4 post valve closed
7/30/2011	5:20:39 PM	Bypass valve closed
7/30/2011	5:20:39 PM	Bubbler valve closed
7/30/2011	5:20:39 PM	Main Vac valve opened
7/30/2011	5:20:39 PM	Helium MFC set to  0.000000
7/30/2011	5:20:39 PM	H2 MFC set to  0.000000
7/30/2011	5:20:39 PM	BCl3 MFC set to  0.000000
7/30/2011	5:20:39 PM	PHl3 MFC set to  0.000000
7/30/2011	5:20:39 PM	SiCl4 MFC set to  0.000000
7/30/2011	5:20:39 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	5:20:39 PM	Tube furnace set to 120
7/30/2011	5:21:09 PM	H2 valve closed
7/30/2011	5:21:09 PM	BCl3 valve closed
7/30/2011	5:21:09 PM	PH3 valve closed
7/30/2011	5:21:09 PM	SiCl4 pre valve closed
7/30/2011	5:21:09 PM	SiCl4 post valve closed
7/30/2011	5:21:09 PM	Bypass valve closed
7/30/2011	5:21:09 PM	Bubbler valve closed
7/30/2011	5:21:09 PM	Helium valve opened
7/30/2011	5:21:09 PM	Main Vac valve opened
7/30/2011	5:21:09 PM	Helium MFC set to  20.000000
7/30/2011	5:21:09 PM	H2 MFC set to  0.000000
7/30/2011	5:21:09 PM	BCl3 MFC set to  0.000000
7/30/2011	5:21:09 PM	PHl3 MFC set to  0.000000
7/30/2011	5:21:09 PM	SiCl4 MFC set to  0.000000
7/30/2011	5:21:09 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	5:21:09 PM	Tube furnace set to 120
7/30/2011	5:21:39 PM	Helium valve closed
7/30/2011	5:21:39 PM	H2 valve closed
7/30/2011	5:21:39 PM	BCl3 valve closed
7/30/2011	5:21:39 PM	PH3 valve closed
7/30/2011	5:21:39 PM	SiCl4 pre valve closed
7/30/2011	5:21:39 PM	SiCl4 post valve closed
7/30/2011	5:21:39 PM	Bypass valve closed
7/30/2011	5:21:39 PM	Bubbler valve closed
7/30/2011	5:21:39 PM	Main Vac valve opened
7/30/2011	5:21:39 PM	Helium MFC set to  0.000000
7/30/2011	5:21:39 PM	H2 MFC set to  0.000000
7/30/2011	5:21:39 PM	BCl3 MFC set to  0.000000
7/30/2011	5:21:39 PM	PHl3 MFC set to  0.000000
7/30/2011	5:21:39 PM	SiCl4 MFC set to  0.000000
7/30/2011	5:21:39 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	5:21:39 PM	Tube furnace set to 120
7/30/2011	5:22:10 PM	H2 valve closed
7/30/2011	5:22:10 PM	BCl3 valve closed
7/30/2011	5:22:10 PM	PH3 valve closed
7/30/2011	5:22:10 PM	SiCl4 pre valve closed
7/30/2011	5:22:10 PM	SiCl4 post valve closed
7/30/2011	5:22:10 PM	Bypass valve closed
7/30/2011	5:22:10 PM	Bubbler valve closed
7/30/2011	5:22:10 PM	Helium valve opened
7/30/2011	5:22:10 PM	Main Vac valve opened
7/30/2011	5:22:10 PM	Helium MFC set to  20.000000
7/30/2011	5:22:10 PM	H2 MFC set to  0.000000
7/30/2011	5:22:10 PM	BCl3 MFC set to  0.000000
7/30/2011	5:22:10 PM	PHl3 MFC set to  0.000000
7/30/2011	5:22:10 PM	SiCl4 MFC set to  0.000000
7/30/2011	5:22:10 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	5:22:10 PM	Tube furnace set to 120
7/30/2011	5:22:40 PM	Helium valve closed
7/30/2011	5:22:40 PM	H2 valve closed
7/30/2011	5:22:40 PM	BCl3 valve closed
7/30/2011	5:22:40 PM	PH3 valve closed
7/30/2011	5:22:40 PM	SiCl4 pre valve closed
7/30/2011	5:22:40 PM	SiCl4 post valve closed
7/30/2011	5:22:40 PM	Bypass valve closed
7/30/2011	5:22:40 PM	Bubbler valve closed
7/30/2011	5:22:40 PM	Main Vac valve opened
7/30/2011	5:22:40 PM	Helium MFC set to  0.000000
7/30/2011	5:22:40 PM	H2 MFC set to  0.000000
7/30/2011	5:22:40 PM	BCl3 MFC set to  0.000000
7/30/2011	5:22:40 PM	PHl3 MFC set to  0.000000
7/30/2011	5:22:40 PM	SiCl4 MFC set to  0.000000
7/30/2011	5:22:40 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	5:22:40 PM	Tube furnace set to 120
7/30/2011	5:23:10 PM	H2 valve closed
7/30/2011	5:23:10 PM	BCl3 valve closed
7/30/2011	5:23:10 PM	PH3 valve closed
7/30/2011	5:23:10 PM	SiCl4 pre valve closed
7/30/2011	5:23:10 PM	SiCl4 post valve closed
7/30/2011	5:23:10 PM	Bypass valve closed
7/30/2011	5:23:10 PM	Bubbler valve closed
7/30/2011	5:23:10 PM	Helium valve opened
7/30/2011	5:23:10 PM	Main Vac valve opened
7/30/2011	5:23:10 PM	Helium MFC set to  20.000000
7/30/2011	5:23:10 PM	H2 MFC set to  0.000000
7/30/2011	5:23:10 PM	BCl3 MFC set to  0.000000
7/30/2011	5:23:10 PM	PHl3 MFC set to  0.000000
7/30/2011	5:23:10 PM	SiCl4 MFC set to  0.000000
7/30/2011	5:23:10 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	5:23:10 PM	Tube furnace set to 120
7/30/2011	5:23:40 PM	Helium valve closed
7/30/2011	5:23:40 PM	H2 valve closed
7/30/2011	5:23:40 PM	BCl3 valve closed
7/30/2011	5:23:40 PM	PH3 valve closed
7/30/2011	5:23:40 PM	SiCl4 pre valve closed
7/30/2011	5:23:40 PM	SiCl4 post valve closed
7/30/2011	5:23:40 PM	Bypass valve closed
7/30/2011	5:23:40 PM	Bubbler valve closed
7/30/2011	5:23:40 PM	Main Vac valve opened
7/30/2011	5:23:40 PM	Helium MFC set to  0.000000
7/30/2011	5:23:40 PM	H2 MFC set to  0.000000
7/30/2011	5:23:40 PM	BCl3 MFC set to  0.000000
7/30/2011	5:23:40 PM	PHl3 MFC set to  0.000000
7/30/2011	5:23:40 PM	SiCl4 MFC set to  0.000000
7/30/2011	5:23:40 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	5:23:40 PM	Tube furnace set to 120
7/30/2011	5:24:10 PM	H2 valve closed
7/30/2011	5:24:10 PM	BCl3 valve closed
7/30/2011	5:24:10 PM	PH3 valve closed
7/30/2011	5:24:10 PM	SiCl4 pre valve closed
7/30/2011	5:24:10 PM	SiCl4 post valve closed
7/30/2011	5:24:10 PM	Bypass valve closed
7/30/2011	5:24:10 PM	Bubbler valve closed
7/30/2011	5:24:10 PM	Helium valve opened
7/30/2011	5:24:10 PM	Main Vac valve opened
7/30/2011	5:24:10 PM	Helium MFC set to  20.000000
7/30/2011	5:24:10 PM	H2 MFC set to  0.000000
7/30/2011	5:24:10 PM	BCl3 MFC set to  0.000000
7/30/2011	5:24:10 PM	PHl3 MFC set to  0.000000
7/30/2011	5:24:10 PM	SiCl4 MFC set to  0.000000
7/30/2011	5:24:10 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	5:24:11 PM	Tube furnace set to 120
7/30/2011	5:24:41 PM	Helium valve closed
7/30/2011	5:24:41 PM	H2 valve closed
7/30/2011	5:24:41 PM	BCl3 valve closed
7/30/2011	5:24:41 PM	PH3 valve closed
7/30/2011	5:24:41 PM	SiCl4 pre valve closed
7/30/2011	5:24:41 PM	SiCl4 post valve closed
7/30/2011	5:24:41 PM	Bypass valve closed
7/30/2011	5:24:41 PM	Bubbler valve closed
7/30/2011	5:24:41 PM	Main Vac valve opened
7/30/2011	5:24:41 PM	Helium MFC set to  0.000000
7/30/2011	5:24:41 PM	H2 MFC set to  0.000000
7/30/2011	5:24:41 PM	BCl3 MFC set to  0.000000
7/30/2011	5:24:41 PM	PHl3 MFC set to  0.000000
7/30/2011	5:24:41 PM	SiCl4 MFC set to  0.000000
7/30/2011	5:24:41 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	5:24:41 PM	Tube furnace set to 120
7/30/2011	5:25:11 PM	H2 valve closed
7/30/2011	5:25:11 PM	BCl3 valve closed
7/30/2011	5:25:11 PM	PH3 valve closed
7/30/2011	5:25:11 PM	SiCl4 pre valve closed
7/30/2011	5:25:11 PM	SiCl4 post valve closed
7/30/2011	5:25:11 PM	Bypass valve closed
7/30/2011	5:25:11 PM	Bubbler valve closed
7/30/2011	5:25:11 PM	Helium valve opened
7/30/2011	5:25:11 PM	Main Vac valve opened
7/30/2011	5:25:11 PM	Helium MFC set to  20.000000
7/30/2011	5:25:11 PM	H2 MFC set to  0.000000
7/30/2011	5:25:11 PM	BCl3 MFC set to  0.000000
7/30/2011	5:25:11 PM	PHl3 MFC set to  0.000000
7/30/2011	5:25:11 PM	SiCl4 MFC set to  0.000000
7/30/2011	5:25:11 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	5:25:11 PM	Tube furnace set to 120
7/30/2011	5:25:41 PM	Helium valve closed
7/30/2011	5:25:41 PM	H2 valve closed
7/30/2011	5:25:41 PM	BCl3 valve closed
7/30/2011	5:25:41 PM	PH3 valve closed
7/30/2011	5:25:41 PM	SiCl4 pre valve closed
7/30/2011	5:25:41 PM	SiCl4 post valve closed
7/30/2011	5:25:41 PM	Bypass valve closed
7/30/2011	5:25:41 PM	Bubbler valve closed
7/30/2011	5:25:41 PM	Main Vac valve opened
7/30/2011	5:25:41 PM	Helium MFC set to  0.000000
7/30/2011	5:25:41 PM	H2 MFC set to  0.000000
7/30/2011	5:25:41 PM	BCl3 MFC set to  0.000000
7/30/2011	5:25:41 PM	PHl3 MFC set to  0.000000
7/30/2011	5:25:41 PM	SiCl4 MFC set to  0.000000
7/30/2011	5:25:41 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	5:25:41 PM	Tube furnace set to 120
7/30/2011	5:25:42 PM	Run finished at 5:25 PM
7/30/2011	5:51:25 PM	Main Vac valve closed
7/30/2011	5:51:40 PM	Main Vac valve opened
7/30/2011	5:52:14 PM	Recipe started at 5:52 PM
7/30/2011	5:52:14 PM	Helium valve closed
7/30/2011	5:52:14 PM	H2 valve closed
7/30/2011	5:52:14 PM	BCl3 valve closed
7/30/2011	5:52:14 PM	SiCl4 pre valve closed
7/30/2011	5:52:14 PM	SiCl4 post valve closed
7/30/2011	5:52:14 PM	Main Vac valve closed
7/30/2011	5:52:14 PM	Bypass valve closed
7/30/2011	5:52:14 PM	Bubbler valve closed
7/30/2011	5:52:14 PM	PH3 valve opened
7/30/2011	5:52:14 PM	Helium MFC set to  0.000000
7/30/2011	5:52:14 PM	H2 MFC set to  0.000000
7/30/2011	5:52:14 PM	BCl3 MFC set to  0.000000
7/30/2011	5:52:14 PM	PHl3 MFC set to  0.000000
7/30/2011	5:52:14 PM	SiCl4 MFC set to  0.000000
7/30/2011	5:52:14 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	5:52:14 PM	Tube furnace set to 0
7/30/2011	5:52:17 PM	Helium valve closed
7/30/2011	5:52:17 PM	BCl3 valve closed
7/30/2011	5:52:17 PM	PH3 valve closed
7/30/2011	5:52:17 PM	SiCl4 pre valve closed
7/30/2011	5:52:17 PM	SiCl4 post valve closed
7/30/2011	5:52:17 PM	Main Vac valve closed
7/30/2011	5:52:17 PM	Bypass valve closed
7/30/2011	5:52:17 PM	Bubbler valve closed
7/30/2011	5:52:17 PM	H2 valve opened
7/30/2011	5:52:17 PM	Helium MFC set to  0.000000
7/30/2011	5:52:17 PM	H2 MFC set to  500.000000
7/30/2011	5:52:17 PM	BCl3 MFC set to  0.000000
7/30/2011	5:52:17 PM	PHl3 MFC set to  0.000000
7/30/2011	5:52:17 PM	SiCl4 MFC set to  0.000000
7/30/2011	5:52:17 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	5:52:17 PM	Tube furnace set to 0
7/30/2011	5:53:21 PM	Helium valve closed
7/30/2011	5:53:21 PM	BCl3 valve closed
7/30/2011	5:53:21 PM	PH3 valve closed
7/30/2011	5:53:21 PM	SiCl4 pre valve closed
7/30/2011	5:53:21 PM	SiCl4 post valve closed
7/30/2011	5:53:21 PM	Main Vac valve closed
7/30/2011	5:53:21 PM	Bypass valve closed
7/30/2011	5:53:21 PM	H2 valve opened
7/30/2011	5:53:21 PM	Bubbler valve opened
7/30/2011	5:53:21 PM	Helium MFC set to  0.000000
7/30/2011	5:53:21 PM	H2 MFC set to  500.000000
7/30/2011	5:53:21 PM	BCl3 MFC set to  0.000000
7/30/2011	5:53:21 PM	PHl3 MFC set to  0.000000
7/30/2011	5:53:21 PM	SiCl4 MFC set to  0.000000
7/30/2011	5:53:21 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	5:53:21 PM	Tube furnace set to 0
7/30/2011	5:53:22 PM	Helium valve closed
7/30/2011	5:53:22 PM	BCl3 valve closed
7/30/2011	5:53:22 PM	PH3 valve closed
7/30/2011	5:53:22 PM	SiCl4 pre valve closed
7/30/2011	5:53:22 PM	SiCl4 post valve closed
7/30/2011	5:53:22 PM	Main Vac valve closed
7/30/2011	5:53:22 PM	Bypass valve closed
7/30/2011	5:53:22 PM	H2 valve opened
7/30/2011	5:53:22 PM	Bubbler valve opened
7/30/2011	5:53:22 PM	Helium MFC set to  0.000000
7/30/2011	5:53:22 PM	H2 MFC set to  500.000000
7/30/2011	5:53:22 PM	BCl3 MFC set to  0.000000
7/30/2011	5:53:22 PM	PHl3 MFC set to  0.000000
7/30/2011	5:53:22 PM	SiCl4 MFC set to  0.000000
7/30/2011	5:53:22 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	5:53:22 PM	Tube furnace set to 1000
7/30/2011	6:13:22 PM	Helium valve closed
7/30/2011	6:13:22 PM	BCl3 valve closed
7/30/2011	6:13:22 PM	PH3 valve closed
7/30/2011	6:13:22 PM	Main Vac valve closed
7/30/2011	6:13:22 PM	Bypass valve closed
7/30/2011	6:13:22 PM	H2 valve opened
7/30/2011	6:13:22 PM	SiCl4 pre valve opened
7/30/2011	6:13:22 PM	SiCl4 post valve opened
7/30/2011	6:13:22 PM	Bubbler valve opened
7/30/2011	6:13:22 PM	Helium MFC set to  0.000000
7/30/2011	6:13:22 PM	H2 MFC set to  500.000000
7/30/2011	6:13:22 PM	BCl3 MFC set to  0.000000
7/30/2011	6:13:22 PM	PHl3 MFC set to  0.000000
7/30/2011	6:13:22 PM	SiCl4 MFC set to  50.000000
7/30/2011	6:13:22 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	6:13:22 PM	Tube furnace set to 1000
7/30/2011	6:33:22 PM	Helium valve closed
7/30/2011	6:33:22 PM	BCl3 valve closed
7/30/2011	6:33:22 PM	PH3 valve closed
7/30/2011	6:33:22 PM	SiCl4 pre valve closed
7/30/2011	6:33:22 PM	SiCl4 post valve closed
7/30/2011	6:33:22 PM	Main Vac valve closed
7/30/2011	6:33:22 PM	Bypass valve closed
7/30/2011	6:33:22 PM	H2 valve opened
7/30/2011	6:33:23 PM	Bubbler valve opened
7/30/2011	6:33:23 PM	Helium MFC set to  0.000000
7/30/2011	6:33:23 PM	H2 MFC set to  500.000000
7/30/2011	6:33:23 PM	BCl3 MFC set to  0.000000
7/30/2011	6:33:23 PM	PHl3 MFC set to  0.000000
7/30/2011	6:33:23 PM	SiCl4 MFC set to  0.000000
7/30/2011	6:33:23 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	6:33:23 PM	Tube furnace set to 975
7/30/2011	6:33:53 PM	Helium valve closed
7/30/2011	6:33:53 PM	BCl3 valve closed
7/30/2011	6:33:53 PM	PH3 valve closed
7/30/2011	6:33:53 PM	SiCl4 pre valve closed
7/30/2011	6:33:53 PM	SiCl4 post valve closed
7/30/2011	6:33:53 PM	Main Vac valve closed
7/30/2011	6:33:53 PM	Bypass valve closed
7/30/2011	6:33:53 PM	H2 valve opened
7/30/2011	6:33:53 PM	Bubbler valve opened
7/30/2011	6:33:53 PM	Helium MFC set to  0.000000
7/30/2011	6:33:53 PM	H2 MFC set to  500.000000
7/30/2011	6:33:53 PM	BCl3 MFC set to  0.000000
7/30/2011	6:33:53 PM	PHl3 MFC set to  0.000000
7/30/2011	6:33:53 PM	SiCl4 MFC set to  0.000000
7/30/2011	6:33:53 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	6:33:53 PM	Tube furnace set to 950
7/30/2011	6:34:23 PM	Helium valve closed
7/30/2011	6:34:23 PM	BCl3 valve closed
7/30/2011	6:34:23 PM	PH3 valve closed
7/30/2011	6:34:23 PM	SiCl4 pre valve closed
7/30/2011	6:34:23 PM	SiCl4 post valve closed
7/30/2011	6:34:23 PM	Main Vac valve closed
7/30/2011	6:34:23 PM	Bypass valve closed
7/30/2011	6:34:23 PM	H2 valve opened
7/30/2011	6:34:23 PM	Bubbler valve opened
7/30/2011	6:34:23 PM	Helium MFC set to  0.000000
7/30/2011	6:34:23 PM	H2 MFC set to  500.000000
7/30/2011	6:34:23 PM	BCl3 MFC set to  0.000000
7/30/2011	6:34:23 PM	PHl3 MFC set to  0.000000
7/30/2011	6:34:23 PM	SiCl4 MFC set to  0.000000
7/30/2011	6:34:23 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	6:34:23 PM	Tube furnace set to 925
7/30/2011	6:34:53 PM	Helium valve closed
7/30/2011	6:34:53 PM	BCl3 valve closed
7/30/2011	6:34:53 PM	PH3 valve closed
7/30/2011	6:34:53 PM	SiCl4 pre valve closed
7/30/2011	6:34:53 PM	SiCl4 post valve closed
7/30/2011	6:34:53 PM	Main Vac valve closed
7/30/2011	6:34:53 PM	Bypass valve closed
7/30/2011	6:34:53 PM	H2 valve opened
7/30/2011	6:34:53 PM	Bubbler valve opened
7/30/2011	6:34:53 PM	Helium MFC set to  0.000000
7/30/2011	6:34:53 PM	H2 MFC set to  500.000000
7/30/2011	6:34:53 PM	BCl3 MFC set to  0.000000
7/30/2011	6:34:53 PM	PHl3 MFC set to  0.000000
7/30/2011	6:34:53 PM	SiCl4 MFC set to  0.000000
7/30/2011	6:34:53 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	6:34:53 PM	Tube furnace set to 900
7/30/2011	6:35:23 PM	Helium valve closed
7/30/2011	6:35:23 PM	BCl3 valve closed
7/30/2011	6:35:23 PM	PH3 valve closed
7/30/2011	6:35:23 PM	SiCl4 pre valve closed
7/30/2011	6:35:23 PM	SiCl4 post valve closed
7/30/2011	6:35:23 PM	Main Vac valve closed
7/30/2011	6:35:23 PM	Bypass valve closed
7/30/2011	6:35:23 PM	H2 valve opened
7/30/2011	6:35:23 PM	Bubbler valve opened
7/30/2011	6:35:23 PM	Helium MFC set to  0.000000
7/30/2011	6:35:23 PM	H2 MFC set to  500.000000
7/30/2011	6:35:23 PM	BCl3 MFC set to  0.000000
7/30/2011	6:35:23 PM	PHl3 MFC set to  0.000000
7/30/2011	6:35:23 PM	SiCl4 MFC set to  0.000000
7/30/2011	6:35:23 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	6:35:23 PM	Tube furnace set to 850
7/30/2011	6:36:23 PM	Helium valve closed
7/30/2011	6:36:23 PM	BCl3 valve closed
7/30/2011	6:36:23 PM	PH3 valve closed
7/30/2011	6:36:24 PM	SiCl4 pre valve closed
7/30/2011	6:36:24 PM	SiCl4 post valve closed
7/30/2011	6:36:24 PM	Main Vac valve closed
7/30/2011	6:36:24 PM	Bypass valve closed
7/30/2011	6:36:24 PM	H2 valve opened
7/30/2011	6:36:24 PM	Bubbler valve opened
7/30/2011	6:36:24 PM	Helium MFC set to  0.000000
7/30/2011	6:36:24 PM	H2 MFC set to  500.000000
7/30/2011	6:36:24 PM	BCl3 MFC set to  0.000000
7/30/2011	6:36:24 PM	PHl3 MFC set to  0.000000
7/30/2011	6:36:24 PM	SiCl4 MFC set to  0.000000
7/30/2011	6:36:24 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	6:36:24 PM	Tube furnace set to 800
7/30/2011	6:37:24 PM	Helium valve closed
7/30/2011	6:37:24 PM	BCl3 valve closed
7/30/2011	6:37:24 PM	PH3 valve closed
7/30/2011	6:37:24 PM	SiCl4 pre valve closed
7/30/2011	6:37:24 PM	SiCl4 post valve closed
7/30/2011	6:37:24 PM	Main Vac valve closed
7/30/2011	6:37:24 PM	Bypass valve closed
7/30/2011	6:37:24 PM	H2 valve opened
7/30/2011	6:37:24 PM	Bubbler valve opened
7/30/2011	6:37:24 PM	Helium MFC set to  0.000000
7/30/2011	6:37:24 PM	H2 MFC set to  500.000000
7/30/2011	6:37:24 PM	BCl3 MFC set to  0.000000
7/30/2011	6:37:24 PM	PHl3 MFC set to  0.000000
7/30/2011	6:37:24 PM	SiCl4 MFC set to  0.000000
7/30/2011	6:37:24 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	6:37:24 PM	Tube furnace set to 750
7/30/2011	6:38:24 PM	H2 valve closed
7/30/2011	6:38:24 PM	BCl3 valve closed
7/30/2011	6:38:24 PM	PH3 valve closed
7/30/2011	6:38:24 PM	SiCl4 pre valve closed
7/30/2011	6:38:24 PM	SiCl4 post valve closed
7/30/2011	6:38:24 PM	Main Vac valve closed
7/30/2011	6:38:24 PM	Bypass valve closed
7/30/2011	6:38:24 PM	Helium valve opened
7/30/2011	6:38:24 PM	Bubbler valve opened
7/30/2011	6:38:24 PM	Helium MFC set to  500.000000
7/30/2011	6:38:24 PM	H2 MFC set to  0.000000
7/30/2011	6:38:24 PM	BCl3 MFC set to  0.000000
7/30/2011	6:38:24 PM	PHl3 MFC set to  0.000000
7/30/2011	6:38:24 PM	SiCl4 MFC set to  0.000000
7/30/2011	6:38:24 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	6:38:24 PM	Tube furnace set to 700
7/30/2011	6:39:54 PM	H2 valve closed
7/30/2011	6:39:54 PM	BCl3 valve closed
7/30/2011	6:39:54 PM	PH3 valve closed
7/30/2011	6:39:54 PM	SiCl4 pre valve closed
7/30/2011	6:39:54 PM	SiCl4 post valve closed
7/30/2011	6:39:54 PM	Main Vac valve closed
7/30/2011	6:39:54 PM	Bypass valve closed
7/30/2011	6:39:54 PM	Helium valve opened
7/30/2011	6:39:54 PM	Bubbler valve opened
7/30/2011	6:39:54 PM	Helium MFC set to  500.000000
7/30/2011	6:39:54 PM	H2 MFC set to  0.000000
7/30/2011	6:39:54 PM	BCl3 MFC set to  0.000000
7/30/2011	6:39:54 PM	PHl3 MFC set to  0.000000
7/30/2011	6:39:54 PM	SiCl4 MFC set to  0.000000
7/30/2011	6:39:54 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	6:39:54 PM	Tube furnace set to 0
7/30/2011	6:59:54 PM	Helium valve closed
7/30/2011	6:59:54 PM	H2 valve closed
7/30/2011	6:59:54 PM	BCl3 valve closed
7/30/2011	6:59:54 PM	PH3 valve closed
7/30/2011	6:59:54 PM	SiCl4 pre valve closed
7/30/2011	6:59:54 PM	SiCl4 post valve closed
7/30/2011	6:59:54 PM	Main Vac valve closed
7/30/2011	6:59:54 PM	Bypass valve closed
7/30/2011	6:59:54 PM	Bubbler valve closed
7/30/2011	6:59:54 PM	Helium MFC set to  0.000000
7/30/2011	6:59:54 PM	H2 MFC set to  0.000000
7/30/2011	6:59:54 PM	BCl3 MFC set to  0.000000
7/30/2011	6:59:54 PM	PHl3 MFC set to  0.000000
7/30/2011	6:59:54 PM	SiCl4 MFC set to  0.000000
7/30/2011	6:59:54 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	6:59:54 PM	Tube furnace set to 0
7/30/2011	7:08:58 PM	Run aborted at 7:08 PM
7/30/2011	7:08:58 PM	Helium valve closed
7/30/2011	7:08:58 PM	H2 valve closed
7/30/2011	7:08:58 PM	BCl3 valve closed
7/30/2011	7:08:58 PM	PH3 valve closed
7/30/2011	7:08:58 PM	SiCl4 pre valve closed
7/30/2011	7:08:58 PM	SiCl4 post valve closed
7/30/2011	7:08:58 PM	Bypass valve closed
7/30/2011	7:08:58 PM	Main Vac valve closed
7/30/2011	7:08:58 PM	Bubbler valve closed
7/30/2011	7:08:58 PM	Helium MFC set to  0.000000
7/30/2011	7:08:58 PM	H2 MFC set to  0.000000
7/30/2011	7:08:58 PM	BCl3 MFC set to  0.000000
7/30/2011	7:08:58 PM	PHl3 MFC set to  0.000000
7/30/2011	7:08:58 PM	SiCl4 MFC set to  0.000000
7/30/2011	7:08:58 PM	Tube furnace set to 0
7/30/2011	7:09:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/30/2011	7:09:06 PM	Recipe started at 7:09 PM
7/30/2011	7:09:06 PM	Helium valve closed
7/30/2011	7:09:06 PM	H2 valve closed
7/30/2011	7:09:06 PM	BCl3 valve closed
7/30/2011	7:09:06 PM	PH3 valve closed
7/30/2011	7:09:06 PM	SiCl4 pre valve closed
7/30/2011	7:09:06 PM	SiCl4 post valve closed
7/30/2011	7:09:06 PM	Main Vac valve closed
7/30/2011	7:09:06 PM	Bypass valve closed
7/30/2011	7:09:06 PM	Bubbler valve closed
7/30/2011	7:09:06 PM	Helium MFC set to  0.000000
7/30/2011	7:09:06 PM	H2 MFC set to  0.000000
7/30/2011	7:09:06 PM	BCl3 MFC set to  0.000000
7/30/2011	7:09:06 PM	PHl3 MFC set to  0.000000
7/30/2011	7:09:06 PM	SiCl4 MFC set to  0.000000
7/30/2011	7:09:06 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	7:09:06 PM	Tube furnace set to 0
7/30/2011	7:09:09 PM	H2 valve closed
7/30/2011	7:09:09 PM	BCl3 valve closed
7/30/2011	7:09:09 PM	PH3 valve closed
7/30/2011	7:09:09 PM	SiCl4 pre valve closed
7/30/2011	7:09:09 PM	SiCl4 post valve closed
7/30/2011	7:09:09 PM	Main Vac valve closed
7/30/2011	7:09:09 PM	Bypass valve closed
7/30/2011	7:09:09 PM	Bubbler valve closed
7/30/2011	7:09:09 PM	Helium valve opened
7/30/2011	7:09:09 PM	Helium MFC set to  500.000000
7/30/2011	7:09:09 PM	H2 MFC set to  0.000000
7/30/2011	7:09:09 PM	BCl3 MFC set to  0.000000
7/30/2011	7:09:09 PM	PHl3 MFC set to  0.000000
7/30/2011	7:09:09 PM	SiCl4 MFC set to  0.000000
7/30/2011	7:09:09 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	7:09:09 PM	Tube furnace set to 0
7/30/2011	7:09:13 PM	Helium valve closed
7/30/2011	7:09:13 PM	H2 valve closed
7/30/2011	7:09:13 PM	BCl3 valve closed
7/30/2011	7:09:13 PM	PH3 valve closed
7/30/2011	7:09:13 PM	SiCl4 pre valve closed
7/30/2011	7:09:13 PM	SiCl4 post valve closed
7/30/2011	7:09:13 PM	Main Vac valve closed
7/30/2011	7:09:13 PM	Bypass valve closed
7/30/2011	7:09:13 PM	Bubbler valve closed
7/30/2011	7:09:13 PM	Helium MFC set to  0.000000
7/30/2011	7:09:13 PM	H2 MFC set to  0.000000
7/30/2011	7:09:13 PM	BCl3 MFC set to  0.000000
7/30/2011	7:09:13 PM	PHl3 MFC set to  0.000000
7/30/2011	7:09:13 PM	SiCl4 MFC set to  0.000000
7/30/2011	7:09:13 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	7:09:13 PM	Tube furnace set to 0
7/30/2011	7:09:14 PM	Run finished at 7:09 PM
7/30/2011	7:09:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/30/2011	7:11:52 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/30/2011	7:11:53 PM	Recipe started at 7:11 PM
7/30/2011	7:11:53 PM	Helium valve closed
7/30/2011	7:11:53 PM	H2 valve closed
7/30/2011	7:11:53 PM	BCl3 valve closed
7/30/2011	7:11:53 PM	PH3 valve closed
7/30/2011	7:11:53 PM	SiCl4 pre valve closed
7/30/2011	7:11:53 PM	SiCl4 post valve closed
7/30/2011	7:11:53 PM	Main Vac valve closed
7/30/2011	7:11:53 PM	Bubbler valve closed
7/30/2011	7:11:53 PM	Bypass valve opened
7/30/2011	7:11:53 PM	Helium MFC set to  0.000000
7/30/2011	7:11:53 PM	H2 MFC set to  0.000000
7/30/2011	7:11:53 PM	BCl3 MFC set to  0.000000
7/30/2011	7:11:53 PM	PHl3 MFC set to  0.000000
7/30/2011	7:11:53 PM	SiCl4 MFC set to  0.000000
7/30/2011	7:11:53 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	7:11:53 PM	Tube furnace set to 0
7/30/2011	7:12:57 PM	Helium valve closed
7/30/2011	7:12:57 PM	H2 valve closed
7/30/2011	7:12:57 PM	BCl3 valve closed
7/30/2011	7:12:57 PM	PH3 valve closed
7/30/2011	7:12:57 PM	SiCl4 pre valve closed
7/30/2011	7:12:57 PM	SiCl4 post valve closed
7/30/2011	7:12:57 PM	Main Vac valve closed
7/30/2011	7:12:57 PM	Bubbler valve closed
7/30/2011	7:12:57 PM	Bypass valve opened
7/30/2011	7:12:57 PM	Helium MFC set to  0.000000
7/30/2011	7:12:57 PM	H2 MFC set to  0.000000
7/30/2011	7:12:57 PM	BCl3 MFC set to  0.000000
7/30/2011	7:12:57 PM	PHl3 MFC set to  0.000000
7/30/2011	7:12:57 PM	SiCl4 MFC set to  0.000000
7/30/2011	7:12:57 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	7:12:57 PM	Tube furnace set to 0
7/30/2011	7:13:57 PM	Helium valve closed
7/30/2011	7:13:57 PM	H2 valve closed
7/30/2011	7:13:57 PM	BCl3 valve closed
7/30/2011	7:13:57 PM	PH3 valve closed
7/30/2011	7:13:57 PM	SiCl4 pre valve closed
7/30/2011	7:13:57 PM	SiCl4 post valve closed
7/30/2011	7:13:57 PM	Bypass valve closed
7/30/2011	7:13:57 PM	Bubbler valve closed
7/30/2011	7:13:57 PM	Main Vac valve opened
7/30/2011	7:13:57 PM	Helium MFC set to  0.000000
7/30/2011	7:13:57 PM	H2 MFC set to  0.000000
7/30/2011	7:13:57 PM	BCl3 MFC set to  0.000000
7/30/2011	7:13:57 PM	PHl3 MFC set to  0.000000
7/30/2011	7:13:57 PM	SiCl4 MFC set to  0.000000
7/30/2011	7:13:57 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	7:13:57 PM	Tube furnace set to 0
7/30/2011	7:13:58 PM	Run finished at 7:13 PM
7/30/2011	7:13:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/30/2011	7:17:54 PM	Tube furnace set to 120
7/30/2011	7:27:56 PM	Main Vac valve closed
7/30/2011	7:28:05 PM	Main Vac valve opened
7/30/2011	8:15:32 PM	Main Vac valve closed
7/30/2011	8:15:48 PM	Main Vac valve opened
7/30/2011	8:18:48 PM	Recipe started at 8:18 PM
7/30/2011	8:18:48 PM	Helium valve closed
7/30/2011	8:18:48 PM	H2 valve closed
7/30/2011	8:18:48 PM	BCl3 valve closed
7/30/2011	8:18:48 PM	SiCl4 pre valve closed
7/30/2011	8:18:48 PM	SiCl4 post valve closed
7/30/2011	8:18:48 PM	Main Vac valve closed
7/30/2011	8:18:48 PM	Bypass valve closed
7/30/2011	8:18:48 PM	Bubbler valve closed
7/30/2011	8:18:48 PM	PH3 valve opened
7/30/2011	8:18:48 PM	Helium MFC set to  0.000000
7/30/2011	8:18:48 PM	H2 MFC set to  0.000000
7/30/2011	8:18:48 PM	BCl3 MFC set to  0.000000
7/30/2011	8:18:48 PM	PHl3 MFC set to  0.000000
7/30/2011	8:18:48 PM	SiCl4 MFC set to  0.000000
7/30/2011	8:18:48 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	8:18:48 PM	Tube furnace set to 0
7/30/2011	8:18:51 PM	Helium valve closed
7/30/2011	8:18:51 PM	BCl3 valve closed
7/30/2011	8:18:51 PM	PH3 valve closed
7/30/2011	8:18:51 PM	SiCl4 pre valve closed
7/30/2011	8:18:51 PM	SiCl4 post valve closed
7/30/2011	8:18:51 PM	Main Vac valve closed
7/30/2011	8:18:51 PM	Bypass valve closed
7/30/2011	8:18:51 PM	Bubbler valve closed
7/30/2011	8:18:51 PM	H2 valve opened
7/30/2011	8:18:51 PM	Helium MFC set to  0.000000
7/30/2011	8:18:51 PM	H2 MFC set to  500.000000
7/30/2011	8:18:51 PM	BCl3 MFC set to  0.000000
7/30/2011	8:18:51 PM	PHl3 MFC set to  0.000000
7/30/2011	8:18:51 PM	SiCl4 MFC set to  0.000000
7/30/2011	8:18:51 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	8:18:51 PM	Tube furnace set to 0
7/30/2011	8:19:54 PM	Helium valve closed
7/30/2011	8:19:54 PM	BCl3 valve closed
7/30/2011	8:19:54 PM	PH3 valve closed
7/30/2011	8:19:54 PM	SiCl4 pre valve closed
7/30/2011	8:19:54 PM	SiCl4 post valve closed
7/30/2011	8:19:54 PM	Main Vac valve closed
7/30/2011	8:19:54 PM	Bypass valve closed
7/30/2011	8:19:54 PM	H2 valve opened
7/30/2011	8:19:54 PM	Bubbler valve opened
7/30/2011	8:19:54 PM	Helium MFC set to  0.000000
7/30/2011	8:19:55 PM	H2 MFC set to  500.000000
7/30/2011	8:19:55 PM	BCl3 MFC set to  0.000000
7/30/2011	8:19:55 PM	PHl3 MFC set to  0.000000
7/30/2011	8:19:55 PM	SiCl4 MFC set to  0.000000
7/30/2011	8:19:55 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	8:19:55 PM	Tube furnace set to 0
7/30/2011	8:19:56 PM	Helium valve closed
7/30/2011	8:19:56 PM	BCl3 valve closed
7/30/2011	8:19:56 PM	PH3 valve closed
7/30/2011	8:19:56 PM	SiCl4 pre valve closed
7/30/2011	8:19:56 PM	SiCl4 post valve closed
7/30/2011	8:19:56 PM	Main Vac valve closed
7/30/2011	8:19:56 PM	Bypass valve closed
7/30/2011	8:19:56 PM	H2 valve opened
7/30/2011	8:19:56 PM	Bubbler valve opened
7/30/2011	8:19:56 PM	Helium MFC set to  0.000000
7/30/2011	8:19:56 PM	H2 MFC set to  500.000000
7/30/2011	8:19:56 PM	BCl3 MFC set to  0.000000
7/30/2011	8:19:56 PM	PHl3 MFC set to  0.000000
7/30/2011	8:19:56 PM	SiCl4 MFC set to  0.000000
7/30/2011	8:19:56 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	8:19:56 PM	Tube furnace set to 1000
7/30/2011	8:39:56 PM	Helium valve closed
7/30/2011	8:39:56 PM	BCl3 valve closed
7/30/2011	8:39:56 PM	PH3 valve closed
7/30/2011	8:39:56 PM	Main Vac valve closed
7/30/2011	8:39:56 PM	Bypass valve closed
7/30/2011	8:39:56 PM	H2 valve opened
7/30/2011	8:39:56 PM	SiCl4 pre valve opened
7/30/2011	8:39:56 PM	SiCl4 post valve opened
7/30/2011	8:39:56 PM	Bubbler valve opened
7/30/2011	8:39:56 PM	Helium MFC set to  0.000000
7/30/2011	8:39:56 PM	H2 MFC set to  500.000000
7/30/2011	8:39:56 PM	BCl3 MFC set to  0.000000
7/30/2011	8:39:56 PM	PHl3 MFC set to  0.000000
7/30/2011	8:39:56 PM	SiCl4 MFC set to  50.000000
7/30/2011	8:39:56 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	8:39:56 PM	Tube furnace set to 1000
7/30/2011	8:59:56 PM	Helium valve closed
7/30/2011	8:59:56 PM	BCl3 valve closed
7/30/2011	8:59:56 PM	PH3 valve closed
7/30/2011	8:59:56 PM	SiCl4 pre valve closed
7/30/2011	8:59:56 PM	SiCl4 post valve closed
7/30/2011	8:59:56 PM	Main Vac valve closed
7/30/2011	8:59:56 PM	Bypass valve closed
7/30/2011	8:59:56 PM	H2 valve opened
7/30/2011	8:59:56 PM	Bubbler valve opened
7/30/2011	8:59:56 PM	Helium MFC set to  0.000000
7/30/2011	8:59:56 PM	H2 MFC set to  500.000000
7/30/2011	8:59:56 PM	BCl3 MFC set to  0.000000
7/30/2011	8:59:56 PM	PHl3 MFC set to  0.000000
7/30/2011	8:59:56 PM	SiCl4 MFC set to  0.000000
7/30/2011	8:59:56 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	8:59:56 PM	Tube furnace set to 975
7/30/2011	9:00:56 PM	Helium valve closed
7/30/2011	9:00:56 PM	BCl3 valve closed
7/30/2011	9:00:56 PM	PH3 valve closed
7/30/2011	9:00:56 PM	SiCl4 pre valve closed
7/30/2011	9:00:56 PM	SiCl4 post valve closed
7/30/2011	9:00:56 PM	Main Vac valve closed
7/30/2011	9:00:56 PM	Bypass valve closed
7/30/2011	9:00:56 PM	H2 valve opened
7/30/2011	9:00:56 PM	Bubbler valve opened
7/30/2011	9:00:56 PM	Helium MFC set to  0.000000
7/30/2011	9:00:56 PM	H2 MFC set to  500.000000
7/30/2011	9:00:56 PM	BCl3 MFC set to  0.000000
7/30/2011	9:00:56 PM	PHl3 MFC set to  0.000000
7/30/2011	9:00:56 PM	SiCl4 MFC set to  0.000000
7/30/2011	9:00:56 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	9:00:56 PM	Tube furnace set to 950
7/30/2011	9:01:56 PM	Helium valve closed
7/30/2011	9:01:56 PM	BCl3 valve closed
7/30/2011	9:01:56 PM	PH3 valve closed
7/30/2011	9:01:56 PM	SiCl4 pre valve closed
7/30/2011	9:01:56 PM	SiCl4 post valve closed
7/30/2011	9:01:56 PM	Main Vac valve closed
7/30/2011	9:01:56 PM	Bypass valve closed
7/30/2011	9:01:56 PM	H2 valve opened
7/30/2011	9:01:56 PM	Bubbler valve opened
7/30/2011	9:01:56 PM	Helium MFC set to  0.000000
7/30/2011	9:01:56 PM	H2 MFC set to  500.000000
7/30/2011	9:01:56 PM	BCl3 MFC set to  0.000000
7/30/2011	9:01:56 PM	PHl3 MFC set to  0.000000
7/30/2011	9:01:56 PM	SiCl4 MFC set to  0.000000
7/30/2011	9:01:56 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	9:01:57 PM	Tube furnace set to 925
7/30/2011	9:02:57 PM	Helium valve closed
7/30/2011	9:02:57 PM	BCl3 valve closed
7/30/2011	9:02:57 PM	PH3 valve closed
7/30/2011	9:02:57 PM	SiCl4 pre valve closed
7/30/2011	9:02:57 PM	SiCl4 post valve closed
7/30/2011	9:02:57 PM	Main Vac valve closed
7/30/2011	9:02:57 PM	Bypass valve closed
7/30/2011	9:02:57 PM	H2 valve opened
7/30/2011	9:02:57 PM	Bubbler valve opened
7/30/2011	9:02:57 PM	Helium MFC set to  0.000000
7/30/2011	9:02:57 PM	H2 MFC set to  500.000000
7/30/2011	9:02:57 PM	BCl3 MFC set to  0.000000
7/30/2011	9:02:57 PM	PHl3 MFC set to  0.000000
7/30/2011	9:02:57 PM	SiCl4 MFC set to  0.000000
7/30/2011	9:02:57 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	9:02:57 PM	Tube furnace set to 900
7/30/2011	9:03:57 PM	Helium valve closed
7/30/2011	9:03:57 PM	BCl3 valve closed
7/30/2011	9:03:57 PM	PH3 valve closed
7/30/2011	9:03:57 PM	SiCl4 pre valve closed
7/30/2011	9:03:57 PM	SiCl4 post valve closed
7/30/2011	9:03:57 PM	Main Vac valve closed
7/30/2011	9:03:57 PM	Bypass valve closed
7/30/2011	9:03:57 PM	H2 valve opened
7/30/2011	9:03:57 PM	Bubbler valve opened
7/30/2011	9:03:57 PM	Helium MFC set to  0.000000
7/30/2011	9:03:57 PM	H2 MFC set to  500.000000
7/30/2011	9:03:57 PM	BCl3 MFC set to  0.000000
7/30/2011	9:03:57 PM	PHl3 MFC set to  0.000000
7/30/2011	9:03:57 PM	SiCl4 MFC set to  0.000000
7/30/2011	9:03:57 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	9:03:57 PM	Tube furnace set to 850
7/30/2011	9:05:27 PM	Helium valve closed
7/30/2011	9:05:27 PM	BCl3 valve closed
7/30/2011	9:05:27 PM	PH3 valve closed
7/30/2011	9:05:27 PM	SiCl4 pre valve closed
7/30/2011	9:05:27 PM	SiCl4 post valve closed
7/30/2011	9:05:27 PM	Main Vac valve closed
7/30/2011	9:05:27 PM	Bypass valve closed
7/30/2011	9:05:27 PM	H2 valve opened
7/30/2011	9:05:27 PM	Bubbler valve opened
7/30/2011	9:05:27 PM	Helium MFC set to  0.000000
7/30/2011	9:05:27 PM	H2 MFC set to  500.000000
7/30/2011	9:05:27 PM	BCl3 MFC set to  0.000000
7/30/2011	9:05:27 PM	PHl3 MFC set to  0.000000
7/30/2011	9:05:27 PM	SiCl4 MFC set to  0.000000
7/30/2011	9:05:27 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	9:05:27 PM	Tube furnace set to 800
7/30/2011	9:06:57 PM	H2 valve closed
7/30/2011	9:06:57 PM	BCl3 valve closed
7/30/2011	9:06:57 PM	PH3 valve closed
7/30/2011	9:06:57 PM	SiCl4 pre valve closed
7/30/2011	9:06:57 PM	SiCl4 post valve closed
7/30/2011	9:06:57 PM	Main Vac valve closed
7/30/2011	9:06:57 PM	Bypass valve closed
7/30/2011	9:06:57 PM	Helium valve opened
7/30/2011	9:06:57 PM	Bubbler valve opened
7/30/2011	9:06:57 PM	Helium MFC set to  500.000000
7/30/2011	9:06:57 PM	H2 MFC set to  0.000000
7/30/2011	9:06:57 PM	BCl3 MFC set to  0.000000
7/30/2011	9:06:57 PM	PHl3 MFC set to  0.000000
7/30/2011	9:06:57 PM	SiCl4 MFC set to  0.000000
7/30/2011	9:06:57 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	9:06:57 PM	Tube furnace set to 0
7/30/2011	9:26:57 PM	Helium valve closed
7/30/2011	9:26:57 PM	H2 valve closed
7/30/2011	9:26:57 PM	BCl3 valve closed
7/30/2011	9:26:57 PM	PH3 valve closed
7/30/2011	9:26:57 PM	SiCl4 pre valve closed
7/30/2011	9:26:57 PM	SiCl4 post valve closed
7/30/2011	9:26:57 PM	Main Vac valve closed
7/30/2011	9:26:57 PM	Bypass valve closed
7/30/2011	9:26:57 PM	Bubbler valve closed
7/30/2011	9:26:57 PM	Helium MFC set to  0.000000
7/30/2011	9:26:57 PM	H2 MFC set to  0.000000
7/30/2011	9:26:57 PM	BCl3 MFC set to  0.000000
7/30/2011	9:26:57 PM	PHl3 MFC set to  0.000000
7/30/2011	9:26:57 PM	SiCl4 MFC set to  0.000000
7/30/2011	9:26:57 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	9:26:57 PM	Tube furnace set to 0
7/30/2011	9:46:57 PM	Run finished at 9:46 PM
7/30/2011	10:21:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/30/2011	10:21:08 PM	Recipe started at 10:21 PM
7/30/2011	10:21:08 PM	Helium valve closed
7/30/2011	10:21:08 PM	H2 valve closed
7/30/2011	10:21:08 PM	BCl3 valve closed
7/30/2011	10:21:08 PM	PH3 valve closed
7/30/2011	10:21:08 PM	SiCl4 pre valve closed
7/30/2011	10:21:08 PM	SiCl4 post valve closed
7/30/2011	10:21:08 PM	Main Vac valve closed
7/30/2011	10:21:08 PM	Bypass valve closed
7/30/2011	10:21:08 PM	Bubbler valve closed
7/30/2011	10:21:08 PM	Helium MFC set to  0.000000
7/30/2011	10:21:08 PM	H2 MFC set to  0.000000
7/30/2011	10:21:08 PM	BCl3 MFC set to  0.000000
7/30/2011	10:21:08 PM	PHl3 MFC set to  0.000000
7/30/2011	10:21:08 PM	SiCl4 MFC set to  0.000000
7/30/2011	10:21:08 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	10:21:08 PM	Tube furnace set to 0
7/30/2011	10:21:11 PM	H2 valve closed
7/30/2011	10:21:11 PM	BCl3 valve closed
7/30/2011	10:21:11 PM	PH3 valve closed
7/30/2011	10:21:11 PM	SiCl4 pre valve closed
7/30/2011	10:21:11 PM	SiCl4 post valve closed
7/30/2011	10:21:11 PM	Main Vac valve closed
7/30/2011	10:21:11 PM	Bypass valve closed
7/30/2011	10:21:11 PM	Bubbler valve closed
7/30/2011	10:21:11 PM	Helium valve opened
7/30/2011	10:21:11 PM	Helium MFC set to  500.000000
7/30/2011	10:21:11 PM	H2 MFC set to  0.000000
7/30/2011	10:21:11 PM	BCl3 MFC set to  0.000000
7/30/2011	10:21:11 PM	PHl3 MFC set to  0.000000
7/30/2011	10:21:11 PM	SiCl4 MFC set to  0.000000
7/30/2011	10:21:11 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	10:21:11 PM	Tube furnace set to 0
7/30/2011	10:21:17 PM	Helium valve closed
7/30/2011	10:21:17 PM	H2 valve closed
7/30/2011	10:21:17 PM	BCl3 valve closed
7/30/2011	10:21:17 PM	PH3 valve closed
7/30/2011	10:21:17 PM	SiCl4 pre valve closed
7/30/2011	10:21:17 PM	SiCl4 post valve closed
7/30/2011	10:21:17 PM	Main Vac valve closed
7/30/2011	10:21:17 PM	Bypass valve closed
7/30/2011	10:21:17 PM	Bubbler valve closed
7/30/2011	10:21:17 PM	Helium MFC set to  0.000000
7/30/2011	10:21:17 PM	H2 MFC set to  0.000000
7/30/2011	10:21:17 PM	BCl3 MFC set to  0.000000
7/30/2011	10:21:17 PM	PHl3 MFC set to  0.000000
7/30/2011	10:21:17 PM	SiCl4 MFC set to  0.000000
7/30/2011	10:21:17 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	10:21:17 PM	Tube furnace set to 0
7/30/2011	10:21:18 PM	Run finished at 10:21 PM
7/30/2011	10:21:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/30/2011	10:26:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/30/2011	10:26:42 PM	Recipe started at 10:26 PM
7/30/2011	10:26:42 PM	Helium valve closed
7/30/2011	10:26:42 PM	H2 valve closed
7/30/2011	10:26:42 PM	BCl3 valve closed
7/30/2011	10:26:42 PM	PH3 valve closed
7/30/2011	10:26:42 PM	SiCl4 pre valve closed
7/30/2011	10:26:42 PM	SiCl4 post valve closed
7/30/2011	10:26:42 PM	Main Vac valve closed
7/30/2011	10:26:42 PM	Bubbler valve closed
7/30/2011	10:26:42 PM	Bypass valve opened
7/30/2011	10:26:42 PM	Helium MFC set to  0.000000
7/30/2011	10:26:42 PM	H2 MFC set to  0.000000
7/30/2011	10:26:42 PM	BCl3 MFC set to  0.000000
7/30/2011	10:26:42 PM	PHl3 MFC set to  0.000000
7/30/2011	10:26:42 PM	SiCl4 MFC set to  0.000000
7/30/2011	10:26:42 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	10:26:42 PM	Tube furnace set to 0
7/30/2011	10:27:09 PM	Run aborted at 10:27 PM
7/30/2011	10:27:09 PM	Helium valve closed
7/30/2011	10:27:09 PM	H2 valve closed
7/30/2011	10:27:09 PM	BCl3 valve closed
7/30/2011	10:27:09 PM	PH3 valve closed
7/30/2011	10:27:09 PM	SiCl4 pre valve closed
7/30/2011	10:27:09 PM	SiCl4 post valve closed
7/30/2011	10:27:09 PM	Bypass valve closed
7/30/2011	10:27:09 PM	Main Vac valve closed
7/30/2011	10:27:09 PM	Bubbler valve closed
7/30/2011	10:27:09 PM	Helium MFC set to  0.000000
7/30/2011	10:27:09 PM	H2 MFC set to  0.000000
7/30/2011	10:27:09 PM	BCl3 MFC set to  0.000000
7/30/2011	10:27:09 PM	PHl3 MFC set to  0.000000
7/30/2011	10:27:09 PM	SiCl4 MFC set to  0.000000
7/30/2011	10:27:09 PM	Tube furnace set to 0
7/30/2011	10:27:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/30/2011	10:27:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/30/2011	10:27:12 PM	Recipe started at 10:27 PM
7/30/2011	10:27:12 PM	Helium valve closed
7/30/2011	10:27:12 PM	H2 valve closed
7/30/2011	10:27:12 PM	BCl3 valve closed
7/30/2011	10:27:12 PM	PH3 valve closed
7/30/2011	10:27:12 PM	SiCl4 pre valve closed
7/30/2011	10:27:12 PM	SiCl4 post valve closed
7/30/2011	10:27:12 PM	Main Vac valve closed
7/30/2011	10:27:12 PM	Bypass valve closed
7/30/2011	10:27:12 PM	Bubbler valve closed
7/30/2011	10:27:12 PM	Helium MFC set to  0.000000
7/30/2011	10:27:12 PM	H2 MFC set to  0.000000
7/30/2011	10:27:12 PM	BCl3 MFC set to  0.000000
7/30/2011	10:27:12 PM	PHl3 MFC set to  0.000000
7/30/2011	10:27:12 PM	SiCl4 MFC set to  0.000000
7/30/2011	10:27:12 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	10:27:13 PM	Tube furnace set to 0
7/30/2011	10:27:16 PM	H2 valve closed
7/30/2011	10:27:16 PM	BCl3 valve closed
7/30/2011	10:27:16 PM	PH3 valve closed
7/30/2011	10:27:16 PM	SiCl4 pre valve closed
7/30/2011	10:27:16 PM	SiCl4 post valve closed
7/30/2011	10:27:16 PM	Main Vac valve closed
7/30/2011	10:27:16 PM	Bypass valve closed
7/30/2011	10:27:16 PM	Bubbler valve closed
7/30/2011	10:27:16 PM	Helium valve opened
7/30/2011	10:27:16 PM	Helium MFC set to  500.000000
7/30/2011	10:27:16 PM	H2 MFC set to  0.000000
7/30/2011	10:27:16 PM	BCl3 MFC set to  0.000000
7/30/2011	10:27:16 PM	PHl3 MFC set to  0.000000
7/30/2011	10:27:16 PM	SiCl4 MFC set to  0.000000
7/30/2011	10:27:16 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	10:27:16 PM	Tube furnace set to 0
7/30/2011	10:28:17 PM	Helium valve closed
7/30/2011	10:28:17 PM	H2 valve closed
7/30/2011	10:28:17 PM	BCl3 valve closed
7/30/2011	10:28:17 PM	PH3 valve closed
7/30/2011	10:28:17 PM	SiCl4 pre valve closed
7/30/2011	10:28:17 PM	SiCl4 post valve closed
7/30/2011	10:28:17 PM	Main Vac valve closed
7/30/2011	10:28:17 PM	Bypass valve closed
7/30/2011	10:28:17 PM	Bubbler valve closed
7/30/2011	10:28:17 PM	Helium MFC set to  0.000000
7/30/2011	10:28:17 PM	H2 MFC set to  0.000000
7/30/2011	10:28:17 PM	BCl3 MFC set to  0.000000
7/30/2011	10:28:17 PM	PHl3 MFC set to  0.000000
7/30/2011	10:28:17 PM	SiCl4 MFC set to  0.000000
7/30/2011	10:28:17 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	10:28:17 PM	Tube furnace set to 0
7/30/2011	10:28:18 PM	Run finished at 10:28 PM
7/30/2011	10:28:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
7/30/2011	10:30:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/30/2011	10:30:10 PM	Recipe started at 10:30 PM
7/30/2011	10:30:10 PM	Helium valve closed
7/30/2011	10:30:10 PM	H2 valve closed
7/30/2011	10:30:10 PM	BCl3 valve closed
7/30/2011	10:30:10 PM	PH3 valve closed
7/30/2011	10:30:10 PM	SiCl4 pre valve closed
7/30/2011	10:30:10 PM	SiCl4 post valve closed
7/30/2011	10:30:10 PM	Main Vac valve closed
7/30/2011	10:30:10 PM	Bubbler valve closed
7/30/2011	10:30:10 PM	Bypass valve opened
7/30/2011	10:30:10 PM	Helium MFC set to  0.000000
7/30/2011	10:30:10 PM	H2 MFC set to  0.000000
7/30/2011	10:30:10 PM	BCl3 MFC set to  0.000000
7/30/2011	10:30:10 PM	PHl3 MFC set to  0.000000
7/30/2011	10:30:10 PM	SiCl4 MFC set to  0.000000
7/30/2011	10:30:10 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	10:30:10 PM	Tube furnace set to 0
7/30/2011	10:31:13 PM	Helium valve closed
7/30/2011	10:31:13 PM	H2 valve closed
7/30/2011	10:31:13 PM	BCl3 valve closed
7/30/2011	10:31:13 PM	PH3 valve closed
7/30/2011	10:31:13 PM	SiCl4 pre valve closed
7/30/2011	10:31:13 PM	SiCl4 post valve closed
7/30/2011	10:31:13 PM	Main Vac valve closed
7/30/2011	10:31:13 PM	Bubbler valve closed
7/30/2011	10:31:13 PM	Bypass valve opened
7/30/2011	10:31:13 PM	Helium MFC set to  0.000000
7/30/2011	10:31:13 PM	H2 MFC set to  0.000000
7/30/2011	10:31:13 PM	BCl3 MFC set to  0.000000
7/30/2011	10:31:13 PM	PHl3 MFC set to  0.000000
7/30/2011	10:31:13 PM	SiCl4 MFC set to  0.000000
7/30/2011	10:31:13 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	10:31:13 PM	Tube furnace set to 0
7/30/2011	10:32:13 PM	Helium valve closed
7/30/2011	10:32:13 PM	H2 valve closed
7/30/2011	10:32:13 PM	BCl3 valve closed
7/30/2011	10:32:13 PM	PH3 valve closed
7/30/2011	10:32:13 PM	SiCl4 pre valve closed
7/30/2011	10:32:13 PM	SiCl4 post valve closed
7/30/2011	10:32:13 PM	Bypass valve closed
7/30/2011	10:32:13 PM	Bubbler valve closed
7/30/2011	10:32:13 PM	Main Vac valve opened
7/30/2011	10:32:13 PM	Helium MFC set to  0.000000
7/30/2011	10:32:13 PM	H2 MFC set to  0.000000
7/30/2011	10:32:13 PM	BCl3 MFC set to  0.000000
7/30/2011	10:32:13 PM	PHl3 MFC set to  0.000000
7/30/2011	10:32:13 PM	SiCl4 MFC set to  0.000000
7/30/2011	10:32:13 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	10:32:13 PM	Tube furnace set to 0
7/30/2011	10:32:14 PM	Run finished at 10:32 PM
7/30/2011	10:32:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
7/30/2011	10:59:49 PM	Main Vac valve closed
7/30/2011	10:59:56 PM	Main Vac valve opened
7/30/2011	11:06:41 PM	Main Vac valve closed
7/30/2011	11:06:51 PM	Main Vac valve opened
7/30/2011	11:38:52 PM	Main Vac valve closed
7/30/2011	11:39:10 PM	Main Vac valve opened
7/30/2011	11:42:23 PM	Recipe started at 11:42 PM
7/30/2011	11:42:23 PM	Helium valve closed
7/30/2011	11:42:23 PM	H2 valve closed
7/30/2011	11:42:23 PM	BCl3 valve closed
7/30/2011	11:42:23 PM	SiCl4 pre valve closed
7/30/2011	11:42:23 PM	SiCl4 post valve closed
7/30/2011	11:42:23 PM	Main Vac valve closed
7/30/2011	11:42:23 PM	Bypass valve closed
7/30/2011	11:42:23 PM	Bubbler valve closed
7/30/2011	11:42:23 PM	PH3 valve opened
7/30/2011	11:42:23 PM	Helium MFC set to  0.000000
7/30/2011	11:42:23 PM	H2 MFC set to  0.000000
7/30/2011	11:42:23 PM	BCl3 MFC set to  0.000000
7/30/2011	11:42:23 PM	PHl3 MFC set to  0.000000
7/30/2011	11:42:23 PM	SiCl4 MFC set to  0.000000
7/30/2011	11:42:23 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	11:42:23 PM	Tube furnace set to 0
7/30/2011	11:42:26 PM	Helium valve closed
7/30/2011	11:42:26 PM	BCl3 valve closed
7/30/2011	11:42:26 PM	PH3 valve closed
7/30/2011	11:42:26 PM	SiCl4 pre valve closed
7/30/2011	11:42:26 PM	SiCl4 post valve closed
7/30/2011	11:42:26 PM	Main Vac valve closed
7/30/2011	11:42:26 PM	Bypass valve closed
7/30/2011	11:42:26 PM	Bubbler valve closed
7/30/2011	11:42:26 PM	H2 valve opened
7/30/2011	11:42:26 PM	Helium MFC set to  0.000000
7/30/2011	11:42:26 PM	H2 MFC set to  500.000000
7/30/2011	11:42:26 PM	BCl3 MFC set to  0.000000
7/30/2011	11:42:26 PM	PHl3 MFC set to  0.000000
7/30/2011	11:42:26 PM	SiCl4 MFC set to  0.000000
7/30/2011	11:42:26 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	11:42:27 PM	Tube furnace set to 0
7/30/2011	11:43:32 PM	Helium valve closed
7/30/2011	11:43:32 PM	BCl3 valve closed
7/30/2011	11:43:32 PM	PH3 valve closed
7/30/2011	11:43:32 PM	SiCl4 pre valve closed
7/30/2011	11:43:32 PM	SiCl4 post valve closed
7/30/2011	11:43:32 PM	Main Vac valve closed
7/30/2011	11:43:32 PM	Bypass valve closed
7/30/2011	11:43:32 PM	H2 valve opened
7/30/2011	11:43:32 PM	Bubbler valve opened
7/30/2011	11:43:32 PM	Helium MFC set to  0.000000
7/30/2011	11:43:32 PM	H2 MFC set to  500.000000
7/30/2011	11:43:32 PM	BCl3 MFC set to  0.000000
7/30/2011	11:43:32 PM	PHl3 MFC set to  0.000000
7/30/2011	11:43:32 PM	SiCl4 MFC set to  0.000000
7/30/2011	11:43:32 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	11:43:32 PM	Tube furnace set to 0
7/30/2011	11:43:33 PM	Helium valve closed
7/30/2011	11:43:33 PM	BCl3 valve closed
7/30/2011	11:43:33 PM	PH3 valve closed
7/30/2011	11:43:33 PM	SiCl4 pre valve closed
7/30/2011	11:43:33 PM	SiCl4 post valve closed
7/30/2011	11:43:33 PM	Main Vac valve closed
7/30/2011	11:43:33 PM	Bypass valve closed
7/30/2011	11:43:33 PM	H2 valve opened
7/30/2011	11:43:33 PM	Bubbler valve opened
7/30/2011	11:43:33 PM	Helium MFC set to  0.000000
7/30/2011	11:43:33 PM	H2 MFC set to  500.000000
7/30/2011	11:43:33 PM	BCl3 MFC set to  0.000000
7/30/2011	11:43:33 PM	PHl3 MFC set to  0.000000
7/30/2011	11:43:33 PM	SiCl4 MFC set to  0.000000
7/30/2011	11:43:33 PM	Bypass solenoid MFC set to  0.000000
7/30/2011	11:43:33 PM	Tube furnace set to 1000
